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《Journal of The Chinese Ceramic Society》 1988-02
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RESEARCH ON SYNTHESIS OF ULTRAFINE SiC POWDER BY LASER-INDUCED CHEMICAL REACTION

Zhao Shengzhi Zhang Zhisan Zhang Zebo Zhao Yuying Li Zhaolin Wang Tianjuan(Institute of Physics,Academia Sinica)  
Ultrafine SiC powder was prepared from a C_2H_4/SiH_4 system both by pulsed and CW CO_2 laser-driven reaction. Grains of the ultrafine powder prepared in this process were very fine, uniform in size, spherical in shape and extremely pure. Under the pulsed laser operation, the powder was composed of crystalline particles and the mean particle diameter was 230(?). Under the CW laser operation, the powder was composed of amorphous particles and the mean particle diameter was 300(?). The reaction parameters associated with the laser operation and the reaction conditions were examined and the reaction mechanism was discussed.
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