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《Journal of The Chinese Ceramic Society》 2005-05
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ZHANG Jun, ZHAO Qingnan, CHEN Jialin, ZHAO Xiujian (The Key Laboratory of Silicate Materials Science and Engineering of Ministry of Education, Wuhan University of Technology, Wuhan 430070, China)  
Thin films of 8.0% in mole antimony-doped tin oxide were deposited on soda-lime glass substrates with and without SiO_2-coated by the solgel method. The structure and properties of the films treated at different temperatures were characterized by X-ray diffraction(XRD),X-ray photoelectron spectroscopy, UVVis spectrometer and four-probe instrument. The results show that all the films heat treated at 673—823 K for 60 min appear the rutile structure. With the heat treated temperatures increasing, XRD peaks become sharper and the crystal structure is improved gradually. The ionic valence state of Sb on the surface of the films is Sb~(3+) and Sb~(5+). While the annealed temperature is at 723 K and (673 K), the carbon is not burnout and exists in the form of C—O and CO groups in the film. The average transmission in the visible region increases with the increase of heat treatment temperatures. The sheet resistance of antimony-doped tin dioxide thin film coated on soda-lime glass with SiO_2-coated is lower than that of without SiO-coating at the same heat treatment condition.
【Fund】: 国家高技术研究发展863计划(2002AA335030)资助项目。
【CateGory Index】: TB43
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