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《Journal of the Chinese Ceramic Society》 2007-05
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PREPARATION OF SnO_2:Sb FILMS ON SiO_2-COATED SODA-LIME GLASS BY CHEMICAL VAPOR DEPOSITION METHOD

ZHOU Xiang,ZHAO Qingnan,WANG Peng,ZHAO Xiujian(Key Laboratory of Silicate Materials Science and Engineering of Ministry of Education,Wuhan University of Technology,Wuhan 430070,China)  
Antimony-doped tin oxide(ATO)films were deposited on SiO2 coated soda-lime glass substrates by the chemical vapor deposition method.The influence of substrate temperature,substrate conveying speed and the flow rate of N2 on the structure and properties of the films was investigated.The structure,morphology and composition of the films were characterized by X-ray diffrac-tion,scanning electron microscopy,and X-ray photoelectron spectroscopy,ultraviolet-visible spectrometry and doubled beam infrared spectrometry.The results show that the films deposited above 490 ℃ have a rutile structure.With the increase of substrate convey-ance speed,the preferred orientation of the film change from(110)to(200).The ionic valence state of Sb in the films is Sb5+.When the substrate temperature is at 530 ℃,the carbon does not burn out and exists in the form of a C—O group in the film.The transmit-tivity in the visible region increases with the increase of substrate temperatures.The preferred orientation of the film at(110)is beneficial to its infrared reflectance.
【Fund】: 国家高技术研究发展863计划(2002AA335030)资助项目
【CateGory Index】: TB383.2
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