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《Optical Instruments》 2001-Z1
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Development the instrument of monitoring the thickness of film by wideband spectrum

ZHOU Peng fei, CHEN Gui lian, ZHANG Rong fu (College of Optics and Electronics,University of Shanghai for Science and Technology,Shanghai 200093,China)  
The paper presents the principle of monitoring the thickness or thin film by wideband spectrum,especially introduces the components of both hardware and software,and then analyzes the precision of the instrument and gives the result of experiment.
【CateGory Index】: TH74
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