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《Optical Instruments》 2004-04
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Summarization about the manufacture of metrologic gratings

TANG Tian-jin,CAO Xiang-qun,LIN Bin (CNERC for Optical Instrument,Zhejiang University,Hangzhou 310027,China)  
As an important kind of sensing element for instruments,metrologic gratings had been widely used in many fields of industrial production.The categories of metrologic gratings are first given,then the paper focuses on the main technique of gratings manufacture home and aboard,the basal indices for the quality evalution of gratings and means of fabrication are also presented elaborately.
【CateGory Index】: TH74
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