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《Acta Photonica Sinica》 2002-05
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Liu Hongzhong,Zhao Wanhua,Li Dichen,Lu Bingheng Institute of AMT,Xi′an Jiaotong University,Xi′an 710049  
LM series multicoordinate laser interferometer is used in nanopositioning system to realize synchromeasure.Its characteristics are smaller structure,little weight,laser lamp house divided from interferometer and eliminating facts of vibration and heat.Its high resolution,large measuring space and intelligent analysis are fit for IC(Integrated circuit),micro machine,biochip etc.manufacture equipment.The system is controlled by cups and realizes parellel control,high speed real time positioning.
【Fund】: 20 0 0年全国优秀博士论文基金资助项目
【CateGory Index】: TN247;TH744.5
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