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《Acta Photonica Sinica》 2004-09
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Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor

Zhang Cheng, Lu Weiqiang, Wang Yongtian Beijing Institute of Technology,Beijing 100081  
It is hard to precisely control optical characteristic of thin film in wide band using the single wavelength monitor due to the material dispersion, monitoring precision and something else. Broadband monitor can monitor optical characteristic for wide band, therefore it is convenient and precise. However while the thought of broadband monitor had been brought forward, practicability of this kind monitor is low. Recently, with the development of electronics technology and computer technology, make it possible to develop high performance broadband monitor. A new broadband monitor is developed using linear CCD as detector, it can do spectrum scanning very quickly. System can achieve high measuring precision, working with advanced optical thin film coating program, system can fulfill the requirement for automatic control based on broadband monitor.
【CateGory Index】: O484.41
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