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《Journal of Harbin Engineering University》 2003-01
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Differential equation model for lateral comb drive micromachined silicon gyroscopes

LUO Yuesheng(School of Science,Harbin Engineering University, Harbin 150001,china)  
The operating principle of a lateral comb drive micromachined silicon gyroscopes is discussed with its structural sketch given.An expression has been established for the acceleration of a lateral comb drive micromachined silicon gyroscope using the acceleration composition theorem,and a differential equation model has been established for lateral comb drive micromachined silicon gyroscopes.The solution to the differential equation model has been obtained and the fundamental operating law of the lateral comb drive micromachined silicon gyroscopes is then analysed.
【CateGory Index】: V241.5
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【Co-citations】
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1 ZHANG Wei,ZHANG Da-cheng,WANG Yang-Yuan (Institute of Microelectronics,Peking University,Beijing100871,China);Survey and development of MEMS[J];Semiconductor Information;2002-01
2 LIN Hai-feng,YANG Yong-jun,ZHENG Feng (Micro /Nano Technology Centre,HSRI ,Shijiazhuang050051,China);Structural simulation and optimize of capacitive accelerometer[J];Semiconductor Information;2002-06
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4 YU Yi-ting,YUAN Wei-zheng,QIAO Da-yong(MEMS/NEMS Laboratory,Northwest Polytechnical University,Xian 710072,China);MEMS-based MIMU for acceleration measuring[J];Micronanoelectronic Technology;2004-01
5 L Zhijun NI Xuewen MO Bangxian XIANG Bin (Institute of Microelectronics, Peking University, Beijing, 100871);An Output Buffer Amplifier Used in Detection Circuit of Micro Sensor[J];Acta Scicentiarum Naturalum Universitis Pekinesis;2004-03
6 ZHANG Jiaqi,ZHOU Jingran,SUN Changlun,LIU Caixia (College of Electronic Science and Engineering,Jilin University ,Changchun 130012);Research on Two Dimensional Capacitive Acceleration Sensor[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2009-01
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8 JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long (Micro&Nano System Laboratory, Northwestern Polytechnical University,Xi`an 710072 ,China);An Interface Circuit for Capacitive Vibratory Microgyroscopes[J];Chinese Journal of Sensors and Actuators;2006-05
9 XU Ke-jie*,HE Peng-ju,ZHANG Bing(School of Mechatronic Engineering,Jiangxi University of science and technology,Ganzhou Jiangxi 341000,China);Circuit Design for MIMU Based on FPGA[J];Chinese Journal of Sensors and Actuators;2006-06
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【Co-references】
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1 Guo Xiuzhong (Department No.3, Nanjing University of Aeronautics and Astronautics)Ruan Aiwu(Xi'an Flight Automatic Control Research Institute);Theory Analysis of Micromachined Comb-Drive Gyroscope[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1997-03
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