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《Journal of Harbin University of Science and Technology》 2014-01
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Effect of Substrate Temperature on Crystalline Characteristics and Optical Properties of ZnO Thin Films

JIA Xiang-hua;HUANG Hai-liang;FU Si-nian;ZHU Rui-hua;ZUO Gui-hong;CAO Hong-zhong;LI Yue-ying;Mudanjiang Normal College,Heilongjiang Province of Carbon-based Function and Superhard Materials Laboratory;  
ZnO thin films were deposited on glass substrates under different substrate temperatures by rf reactive sputtering. We have studied the influence of growth temperature on microstructural,photoluminescence properties of ZnO thin films of by X-ray diffraction( XRD),absorption spectrum,photoluminescence spectrum( PL). The results indicate that ZnO thin films exhibits a hexagonal wurtzite structure with preferred c-axis orientation: absorption coefficient of the ZnO films in the visible region very small,with absorption coefficient is very high in the ultraviolet region; photoluminescence spectra show that the thin films have strong emission of and violet light.
【Fund】: 牡丹江师范学院科学技术研究项目(QC200904);; 黑龙江省教育厅科学技术研究项目(12521577)
【CateGory Index】: TN304.21
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