SIMULATED ANNEALING OPTIMIZATION ALGORITHM FOR INVERTING ELLIPSOMETRIC SPECTRA
YANG Sheng Hong YU Zhao Xian LI Hui Qiu ZHANG Yue Li MO Dang (Department of Physics, Zhongshan University, Guangzhou, Guangdong 510275, China)
The simulated annealing (SA) optimization algorithm was used to invert ellipsometric spectra. The thickness and the optical constants spectra of the samples can be obtained simultaneously by this method. The adopted SA method was described in detail. As examples of application, calculated results of thickness and optical constants spectra of SiO 2 films and Ba 0.9 Sr 0.1 TiO 3(BST) ferroelectric films on Si substrate were given. The sensitivities in ψ and Δ with respect to the refractive index and the thickness of the film were also discussed.
【CateGory Index】： TN21