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A Study of Preparation Technologies and Testing Methods of a Micro-silicon Accelerometer

The operation principle, construction design,preparaion technologies and testing methods of the ndcrosilicon electrostatically force-balanced accelerometer withtorsional pendulum are introduced. There is the certain reference value to develop a ndcro-silicon accelerometer.
【CateGory Index】: TH824.4
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Chinese Journal Full-text Database 3 Hits
1 GAO Yan,SHI Wen-kang,JI Xiao-jun(Shanghai Jiaotong University,Shanghai 200240,China);Design of Driving Circuit for Microsensor and Its Optimization[J];Chinese Journal of Sensors and Actuators;2007-04
2 SU Yan 1 ,YANG Yong -jun 2 ,WANG Shou -rong 1 ,ZHOU Bai -ling 1 (1.Department of Instrument Science and Engineering,Southeast Univers ity,Nanjing 210096,China;2.Hebei Semiconductor Research Institute,Shijiazhuang 050051,China);A silicon micro-mechanical vibratory angular rate sensor[J];Journal of Functional Materials and Devices;2002-02
3 ;Research on Pendulous Micromechanical Accelerator System[J];MEASUREMENT & CONTROL TECHNOLOGY;1999-03
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