QUANTITATIVE STUDY OF NEW TECHNOLOGY IN NITRIDING OF SILICON
Ma Changying;Ge Changchun; Xia Yuanluo;Chen Limin
In this paper the effect of nitriding atmospheres on nitriding of silicon was studied.X-ray diffraction method was used to determine the quantities of phas- es in nitrided samples.The result shows that silicon can be changed completely into silicon nitrides in which α-Si_3N_4 is major in ammonia or mixture of nitrogen and hy- drogen. The time for complete nitriding in these two atmospheres is much shorter than that in the method using nitrogen only.
【CateGory Index】： TF123.34