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《Laser & Optoelectronics Progress》 2009-03
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Research Progress of Deep-Ultraviolet Optical Coatings

Tian Junlin~(1,2) Shen Lin~1 Zhang Yundong~1 Li Bincheng~1 (1 Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100039,China)  
With the development of deep-ultraviolet(DUV) light sources,especially the excimer lasers,free-electron lasers,and solid-state lasers,the performance of DUV optical coatings have been improved rapidly.The recent developments in DUV optical coatings,including DUV-enhanced aluminum mirrors,oxide multilayer coatings,fluoride multilayer coatings,and oxide-fluoride mixing multilayer coatings are summarized.
【CateGory Index】: O484.41
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【Citations】
Chinese Journal Full-text Database 5 Hits
1 LIU Ying, LI Fu tian (State Key Lab of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China)[WT5HZ];MgF_2-overcoated aluminium films for ultraviolet and vacuum ultraviolet[J];Optics and Precision Engineering;2001-02
2 SHANG Shuzhen~(1,2) YI Kui~1 SHAO Jianda~1 FAN Zhengxiu~1 1 Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800 2 Graduate school of the Chinese Academy of Sciences, Beijing 100039;Development of 193nm Optical Coatings for Photolithography[J];Laser & Optoelectronics Progress;2006-01
3 XUE Chunrong1,2 FAN Zhengxiu1 SHAO Jianda1 1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Siences, Shanghai 201800, China 2 Jiangsu Laboratory of Advanced Functional Materials, Changshu Institute of Technology, Changshu, Jiangsu 215500, China;Vaccum Ultraviolet Optical Coatings and Film Materials[J];Laser & Optoelectronics Progress;2008-01
4 YUAN Jing mei, YI Kui, QI Hong ji, FAN Zheng xiu, SHAO Jian da (R & D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China);Design of 193 nm Optical Thin Films under Practical Structure and Optical Parameters[J];Chinese Journal of Lasers;2004-04
5 Gan Shuyi~(1,2),Xu Xiangdong~1,Hong Yilin~1,Liu Yin~1 and Fu Shaojun~(1*)1.National Synchrotron Radiation Laboratory,USTC,Hefei 230029,China;2.Dept.of Mechanical and Automobile Engineering,Hefei University of Technology 230009,China;Review on Highly Reflecting Mirrors for Vacuum Ultraviolet and X-ray[J];Chinese Journal of Vacuum Science and Technology;2006-06
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 HAN Jianjun,LIU Xiaoxia,ZHAO Xiujian(Key Laboratory for Silicate Materials Science and Engineering of Ministry of Education, Wuhan University of Technology,Wuhan 430070);Structure Design of Hollow Waveguides for Ultraviolet Laser[J];Materials Review;2006-04
2 WU Yan,TANG Yi,NI Guo-qiang,BAI Ting-zhu,HUANG Gang ( Department of Optical Engineering,Beijing Institute of Technology,Beijing 100081,China );FUV Imaging Spectrometer Based on Crossed Czerny-Turner Structure[J];Opto-Electronic Engineering;2009-03
3 WEI Jun-ming~(1,2),WU Yong-gang~(1,2),GU Mu~1,GU Chun-shi~(1,2), MA Xiao-hui~1,WANG Li~(1,2),LIN Xiao-yan~(1,2), CHEN Ling-yan~(1,2) (1.Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China; 2.Institute of Precise Optical Engnieering and Technology, Tongji University, Shanghai 200092, China);Role of Al layer in metallic-dielectric multiplayer[J];Optics and Precision Engineering;2004-01
4 SHANG Shu-zhen1,SHAO Jian-da2,FAN Zheng-xiu2(1.Key Laboratory of Safety Science of Pressurized System,Ministry of Education,School of Mechanical Engineering,East China University of Science and Technology,Shanghai 200237,China;2.Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China);Design of low loss 193 nm HR mirror[J];Optics and Precision Engineering;2008-03
5 Gan Shuyi1,2 Liu Zhengkun1 Sheng Bin1 Xu Xiangdong1 Hong Yilin1 Liu Ying1Zhou Hongjun1 Huo Tonglin1 Fu Shaojun11National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei,Anhui 230029,China2School of Mechanical and Automobile Engineering,Hefei University of Technology,Hefei,Anhui 230009,China;Study on Ir Layer in Vacuum Ultraviolet Wavelength Region Deposited by Electron Gun Evaporation[J];Acta Optica Sinica;2008-10
6 Gan Shuyi1,2 Liu Zhengkun1 Xu Xiangdong1 Hong Yilin1 Liu Ying1Zhou Hongjun1 Huo Tonglin1 Fu Shaojun1 1 National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei,Anhui 230029,China2 School of Mechanical and Automobile Engineering,Hefei University of Technology,Hefei,Anhui 230009,China;Error Analysis for Reflectometer in National Synchrotron Radiation Laboratory[J];Acta Optica Sinica;2008-11
7 GAN Shu-yi1,2,LIU Zheng-kun1,SHENG Bin1,XU Xiang-dong1,HONG Yi-lin1,LIU Ying1,ZHOU Hong-jun1,HUO Tong-lin1,FU Shao-jun1(1 National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China)(2 Department of Mechanical and Automobile Engineering,Hefei University of Technology,Hefei 230009,China);Reflectance of Ir Layer in Vacuum Ultraviolet Wavelength Region Deposited by Ion Beam Sputtering[J];Acta Photonica Sinica;2009-05
8 XUE Chun-rong1,2,3,YI Kui1,SHAO Jian-da1,FAN Zheng-xiu1(1.Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;2.Jiangsu Laboratory of Advanced Functional Materials,Changshu Institute of Technology,Changshu 215500,China;3.National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China);Optical properties of several fluoride materials[J];Optics and Precision Engineering;2009-07
9 SHANG Shuzhen~(1,2) YI Kui~1 SHAO Jianda~1 FAN Zhengxiu~1 1 Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800 2 Graduate school of the Chinese Academy of Sciences, Beijing 100039;Development of 193nm Optical Coatings for Photolithography[J];Laser & Optoelectronics Progress;2006-01
10 HAN Jian-jun,LI Yong-tao,LIU Xiao-xia,ZHAO Xiu-jian(Key Laboratory of Silicate Materials Science and Engineering,Ministry of Education,Wuhan University of Technology,Wuhan 430070,China);Study of Hollow-core Fiber System for Ultraviolet Laser[J];Laser & Infrared;2006-09
【Secondary Citations】
Chinese Journal Full-text Database 7 Hits
1 Ming-hong Yang, Alexandre Gatto, Norbert Kaiser (Fraunhofer IOF, Albert-Einstein-Str. 7, D-07745 Jena, Germany);Research and development of VUV optical coatings for micro mirror applications[J];Optics and Precision Engineering;2005-04
2 Yuan Jingmei Tang Zhaosheng Qi Hongji Shao Jianda Fan Zhengxiu (Research and Development Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800) (Received 28 June 2002; revised 5 September 2002);Analysis of Optical Property for Several Ultraviolet Thin Film Materials[J];Acta Optica Sinica;2003-08
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5 Xie Changqing; Ye Tianchun(The 3rd lab of Microelectronics R&D Center, CAS, 100010);193nm Optical Lithography Technique[J];MICROELECTRONIC TECHNOLOGY;1999-04
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7 Huang Xiangcheng Yang Hua Yang Yimin Zhang Wanhu Shi Jiantao (Xian Institute of Applied optics, Xian,710065);THE COATING RESULTS OF ULTRAVIOLET OPTICAL THIN FILM[J];JOURNAL OF APPLIED OPTICS;1998-05
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