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Research of ZnO-based UV detectors and key technologies

FAN Xiao-ling1,LIU Jun-cheng1,LIU Yun-yan2(1.School of Materials Science and Engineering,Shandong University of Technology,Zibo 255049,China;2.School of Physics and Optoelectronic Information,Shandong University of Technology,Zibo 255049,China)  
ZnO has been regarded as a promising material for UV detector due to its predominant optical and electrical properties recently.The principle,the structure and the characteristics of several types of ZnO-based UV detectors are introduced.Moreover,the influencing factors to the manufacturing process of detectors are also be discussed.
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