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《Diamond & Abrasives Engineering》 2015-02
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Effect of abrasive sizes on lapping performance of fixed abrasive pad when machining quartz glass

WANG Wenze;LI Jun;XIA Lei;WANG Huimin;ZHU Yongwei;ZUO Dunwen;College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics;  
Particle size of fixed abrasive lapping is an important factor which influences the process efficiency,surface quality and even subsequent polishing process.Three diamond fixed abrasive pads(FAP)with different particle size,namely 5μm,14μm and 30μm,were used to lap quartz glass.Surface quality,material removal rate(MRR),acoustic emission signal,coefficient of friction(COF)and wear debris were investigated.Combined with abrasive cutting analysis,the optimal particle size was selected.The results showed that with the increase of particle size,MRRand Raincreased and the mean and amplitude of the acoustic emission signal magnified significantly,while the time required to reach a stable COFlevel rose.The cutting depth distribution of 14μm diamond FAP came close to201.2nm,critical depth of brittle-ductile transition of quartz glass.Lapping quartz glass with 14μm diamond FAP could meet the requirements of high efficient and high quality for hard and brittle material.The MRR was 5.65μm/min with Ra66.8nm.
【Fund】: 国家自然科学基金资助项目(51175260);; 中国博士后科学基金资助项目(2014M551586);; 江苏省博士后科研资助计划(1302069B);; 中央高校基本科研业务专项资金资助项目(NS2013055);; 江苏省高校优势学科建设工程资助
【CateGory Index】: TQ171.731;TG73
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