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《Chinese Journal of Lasers》 2001-05
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Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy

WANG Xue feng WANG Xiang zhao QIAN Feng LU Hong bin SONG Song BU Yang (Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800)  
In this paper, a new method is proposed to enlarge the measurement range of the LD SPM interferometer with a photothermal wavelength modulation. Using this method, the measurement range is enlarged from half wavelength to 125.56 μm and the measurement accuracy is 1.2 nm. The possibility of further enlarging the measurement range is discussed.
【Fund】: 国家自然科学基金!(699780 2 4);; 中国科学院百人计划基金;; 上海市应用材料研究与发展基金资助项目
【CateGory Index】: TH744.3
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