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《Chinese Journal of Lasers》 2009-08
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Optical Constants of Film Materials for Deep Ultraviolet/Ultraviblet

Xue Chunrong~(1,2,3) Yi Kui~1 Qi Hongj~1 Fan Zhengxiu~1 Shao Jianda~1(1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Siences, Shanghai 201800, China2 Jiangsu Laboratory of Advanced Functional Materials, Changshu Institute of Technology,Changshu, Jiangsu 215500, China3 National Synchrotron Radiation Laboratory, University of Science and Technology of China,Hefei, Anhui 230026, China)  
In order to determine the optical constants of fluoride films in deep ultraviolet (DUV) to ultraviolet (UV), high-refractive-index materials such as LaF_3, NdF_3, and GdF_3, and low-refractive-index materials such as MgF_2, AlF_3, and Na_3AlF_6 single thin films are deposited by a resistive-heating boat at different deposition rates and specific substrate temperatures on JGS1 and single crystal MgF_2 substrates. Transmittances in 190~500 nm of all fluoride thin films are measured through business spectrometer in the ambient atmosphere. The optical constants of these films are determined from iterative algorithm combined with the envelope method. These dispersive optical constant values are fitted by Cauchy formula and index formula, respectively. The results are consistent with other relevant articles, which testifies the reliability of the results.
【Fund】: 国家自然科学基金(60678004)资助项目
【CateGory Index】: O484.41
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Chinese Journal Full-text Database 8 Hits
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