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《Chinese Journal of Lasers》 2012-11
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Fabrication of 8-Channel Micro Integrated Filter in 2.0-2.4 μm by Combine Masks and Plating

Luo Haihan Li Yaopeng Cai Qingyuan Liu Dingquan(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)  
Using the method to combine masks and plating the spacer layer of the Fabry-Perot filter,germanium and silicon oxide are selected as the high and low index coating materials,8-channel integrated filter is designed and fabricated with an effective light-transmitting width of 450 μm separated by a block of 30 μm for each channel in the spectral regions of 2.0-2.4 μm.For each channel,the maximum transmittance is greater than 65%,the full width at half maximum(FWHM) is 8-13 nm,as well as,the relative bandwidth is between 0.33%-0.65%.
【CateGory Index】: O484.41
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