Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Chinese Journal of Lasers》 2014-08
Add to Favorite Get Latest Update

High Sensitivity Pneumatic Micro-Distance Measurement System for Lithography Autofocus

Liu Tao;Xu Wendong;Zhao Chengqiang;Wang Chuang;Hu Yonglu;Liu Yang;Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences;The National Center for Nanoscience and Technology of China;  
In order to overcome the shortcoming of the conventional optical focusing method,such as unable to detect on the patterned area,photoetching material′s potential exposure,complicated laser path and low sensitivity,method of using high sensitivity pneumatic micro-distance measurement system for lithography autofocus is investigated.The principle,design,method and error analysis are introduced.The pneumatic micro-distance sensor can detect the varity of air flow to determine the defocusing amount.The varity of air flow is transfered into voltage for piezoelectric translator,and the piezoelectric ceramics will be drived to move to the focus range.Because the air pressure in nozzle flapper is related with detection distance,and the air flow is more sensitive than pressure,hotwire probe is used to detect the varity of air flow.The result shows that the accuracy of the measurement system can reach 100 nm,frequency response can come to 20 Hz,the measuring range can be 20μm.Within a certain range,the detection distance has quite good linear relation with the varity of air flow.
【CateGory Index】: TH814;TP274
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【Citations】
Chinese Journal Full-text Database 5 Hits
1 CHEN Hong,WU Shi-kai,ZHANG Zheng-wei,CHEN Kai,XIAO Rong-shi,ZUO Tie-chuan(College of Laser Engineering,Beijing Univeristy of Technology,Beijing 100022,China);The effect of laser beam characteristics on laser processing[J];Optical Technique;2006-06
2 CHEN Lin (Huazhong Institute of Electro optics,Wuhan 430073,China);The 3-dimension measuring system based on the laser ranging[J];Optical Instruments;2002-02
3 Gao Shiyou1 Ma Lei2 Zhang Runsheng2(1College of Mechanical Engineering,Yanshan University,Qinhuangdao,Hebei 066004,China 2College of Vehicles and Energy,Yanshan University,Qinhuangdao,Hebei 066004,China);Method of Monitoring Cutting Point State in Laser Cutting Plank Process Based on Vision[J];Chinese Journal of Lasers;2012-02
4 Xi Mingzhe Gao Shiyou(College of Mechanical Engineering,Yanshan University,Qinhuangdao,Hebei 066004,China);Microstructures and Mechanism of Cracks Forming of Rene 80 High-Temperature Alloy Fabricated by Laser Rapid Forming Process[J];Chinese Journal of Lasers;2012-08
5 Dai,Li-ming;Jiang;Tong-jun(Southeast University);The Laser Triangulation Measuring Sensor for Accurate Displacement Measurement[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;1994-04
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 XU Xiping1,RI Cholman1,2,YUN Duhen2,Kim Yongmin1,3(1.School of Opto-Electronic Engineering,ChangChun University of Science and Technology,Changchun 130022;2.Department of Physics,Kim Chaek University of Technology,D.P.R.of Korea);A Method of Laser Remote Real-Time Wide Measurement Based on Solid Imaging Element[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2011-03
2 JIN Wen-yan ,ZHAO Hui~,TAO Wei (Dep. of Instrumentation Engineering of Shanghai Jiao Tong University, Shanghai 200030, China);Modeling of Laser Triangulation Sensor and Parameters Optimization[J];Chinese Journal of Sensors and Actuators;2006-04
3 TAN Ding-zhong, WANG Qi-ming, LI Jin-shan, LI Lin (Coll of Mech and Elct Engin,Harbin Engineering University,Harbin 150001,China);Applications of laser range finder in automatic robot manipulator exchange[J];Journal of Transducer Technology;2004-10
4 ZHAO Bin, HOU Jin-long (Dept of Instr,Sch of Mech Sci & Engin,Huazhong University of Science & Technology,Wuhan 430074 China);Nonlinear correcting circuit for laser triangulation measurement based on PSD[J];Journal of Transducer Technology;2005-06
5 REN Shu-yan1,YANG Yong-gang2,LI Jing1,ZHAO Li1,ZHANG Yun3(1.Department of Automation and Electric Engineering,Tianjin University of Technology and Education,Tianjin 300222,China;2.Department of Aviation Engineering,Civil Aviation University of China,Tianjin 300300,China;3.Department of Automatic Measurement and Control,Harbin Institute of Technology,Harbin 150001,China);Design of non-contact measurement system based on conoscopic holography[J];Transducer and Microsystem Technologies;2009-12
6 ;Design of the Laser Triangulation for Steel Plank[J];Electronic Engineer;2002-08
7 WU Chang-chun1, ZHANG Jie1, CAO Jian-guo1, WU Xuan2, LIU Jie2, XU Zhuo-ying2 (1. School of Mechanical Engineering, University of Science and Tech nology Beijing, Beijing 100083, China; 2. Measuring and Control Co., Wuhan Ir on and Steel (Group) Corp., Wuhan 430083, China);Principle of Laser Flatness Gauge and Test for Strip[J];Iron and Steel;2005-02
8 ZHAO Min,QIU Zong-ming,GUO Yan-zhen,LIU Hong-zhao ( School of Mechanical Instrumental Engineering, Xi’an University of Technology, Xi’an 710048, China );Polarization-light triangulation tracking probe[J];Opto-Electronic Engineering;2007-12
9 Zhou Liping Cao Yiping;Design of Pocket Laser Measuring Device Based on PSD[J];Tool Engineering;2006-09
10 Wang Hai,Wang Huilin,Qian Binsen School of Mechanical Engineering,Shandong University of Technology,Zibo,Shandong 255049,China;Investigation and Analysis of Uncertainty of Single-point Laser Optical Triangulation Measurement System[J];Tool Engineering;2011-03
China Proceedings of conference Full-text Database 1 Hits
1 ;激光三角法板材在线测厚系统设计[A];[C];2002
【Secondary Citations】
Chinese Journal Full-text Database 8 Hits
1 Zhao Xiaoming,Chen Jing,He Fei,Tan Hua,Huang Weidong(State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,Xi'an 710072,China);The Cracking Mechanism of Rene88DT Superalloy by Laser Rapid Forming[J];Rare Metal Materials and Engineering;2007-02
2 WANG Zhi-yong(National Center of Laser Technology,Beijing Polytechnic Univ.,Beijing,China),CHEN Kai,ZUO Tie-chuan.p17~19;Influence of High-oiwer CO_2 Laser Beams' Transverse Intensity Distribution on Laser Welding[J];Transactions of The China Welding Institution;2000-03
3 SUN Hong-qing, ZHONG Min-lin, LIU Wen-jin, HE Jin-jiang, LI Xiao-li, ZHU Xiao-feng(Laser Processing Research Centre, Mechanical Engineering Department,Tsinghua University, Beijing 100084, China);Cracking Sensitivity on Laser Cladding Inconel 738 on Directionally Solidified Ni-base Superalloy[J];Journal of Aeronautical Materials;2005-02
4 WANG Jia chun, WANG Xi zhe, HUI Song xiao (GRIKIN Co., Ltd., Beijing 100088, China);Research of Linear Heat Input and Laser Focus Position for Laser Welding HE130 Titanium Alloy[J];Chinese Journal of Lasers;2003-02
5 Wu Xiaoyu Lin Xin Lü Xiaowei Yang Haiou Chen Jing Huang Weidong(State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,Xi′an,Shaanxi 710072,China);Study on Microstructure and Mechanical Properties of Laser Solid Forming 17-4 PH Stainless Steel[J];Chinese Journal of Lasers;2011-02
6 Li Shuyu1 Tian Xinguo2 He Jingdi2 Liu Chao2 (1College of Automative and Transportation,Qingdao Technological University,Qingdao,Shandong 266033,China 2Engineering Training Center,Qingdao Technological University,Qingdao,Shandong 266033,China);Laser Cutting Flow Curve of Automatic Flow Control Valves[J];Chinese Journal of Lasers;2011-10
7 Xi Mingzhe Gao Shiyou(College of Mechanical Engineering,Yanshan University,Qinhuangdao,Hebei 066004,China);Research on Tensile Properties of Inconel 718 Superalloy Fabricated by Laser Rapid Forming Process[J];Chinese Journal of Lasers;2012-03
8 SU Yandong(Beijing University of Aeronautics and Astronautics,Beijing,China);Spectrographic Analysis of Laser Induced Plasma in the Process of High Power Laser Welding[J];China Mechanical Engineering;2000-12
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved