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《Acta Metrologica Sinica》 1993-02
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A Fabry-Perot Interferometer for Measuring Micro-Displacement

Xu Yi, Ye Xiaoyou, Li Chengyang, Xu Jie, Cao Feng (National Institute of Metrology, Beijing 100013)  
A new folded-cavity Fabry-Perot interferometer has been developed for measuring micro-displacement in the range of 100nm to several decade millimeters. The uncertainty of measurement is less than 2nm.
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