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《Journal of Hunan University of Science and Engineering》 2007-12
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The Manufacture Application and Developing Trend of ITO Target

XIAO Jia ZHENG Wei-xing(Ningxia Orient Tantalum Industry Co.Ltd,Shizuishan Ningxia 753000,China)  
The demand for sputtering target materials with high performance and big size are increased with rapid development of electronic industry.The manufacture and application of ITO sputtering target is reported in this paper.Also the domestic and overseas state and development of ITO sputtering target is analyzed and researched.
【CateGory Index】: F416.6
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