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《Mechanical & Electrical Engineering Technology》 2012-05
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Embedded Optical Film Thickness Monitoring System Base on Wide-Band Spectrum Measurement

ZHANG Pei-qiang,LUO Yu-qiang,WANG Qiao-bin(Guangzhou Research Institute of Optics-Mechanics-Electricity Technology and Guangdong Public Laboratory of Modern Control and Optics-Mechanics-Electricity Technology,Guangzhou 510663,China)  
In order to monitor the optical film thickness,this paper develops a kind of embedded optical film thickness monitoring system based on the real-times spectrum measurement and the embedded controlled technology.The monitoring system combines with the ARM9 and Linux embedded operating system,which can monitor the wide-band spectrum and development the accuracy and automatization of optical film thickness monitoring.This paper elaborates the working principle,hardware and software systems of the system in detail.The result showed that the system can be verified to be useful in certain area.
【Fund】: 广东省科技基础条件建设项目(编号:2009B060200004)
【CateGory Index】: TP277
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【Citations】
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