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EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE

Che Lufeng Huang Xiaozhen Xiong BinWang Yuelin(Shanghai Instiute of Microsystem and Information Technology, Chinese Academy of Science)  
An equivalent circuit model of vibratory micro- machined gyroscope's mechanical properties is derived according to its working principle. Equivalent electrical model of gyroscope consists of differential detection capacitance model and equivalent circuit model of oscillating. This simulated model combines the sensor's electrical property with mechanical property. The model is implemented in the circuit simulated tool which is called PSPICE, equivalent electrical model of gyroscope is available in oscillating properties analysis and frequency response to angular rate analysis to optimize its working mode. The model also enables the sensor simulate with the interfacing electronics and analyze the whole character of the sensor and its circuit, thus optimizing design of testing circuits.
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