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《Chinese Journal of Mechanical Engineering》 2003-03
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EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE

Che Lufeng Huang Xiaozhen Xiong BinWang Yuelin(Shanghai Instiute of Microsystem and Information Technology, Chinese Academy of Science)  
An equivalent circuit model of vibratory micro- machined gyroscope's mechanical properties is derived according to its working principle. Equivalent electrical model of gyroscope consists of differential detection capacitance model and equivalent circuit model of oscillating. This simulated model combines the sensor's electrical property with mechanical property. The model is implemented in the circuit simulated tool which is called PSPICE, equivalent electrical model of gyroscope is available in oscillating properties analysis and frequency response to angular rate analysis to optimize its working mode. The model also enables the sensor simulate with the interfacing electronics and analyze the whole character of the sensor and its circuit, thus optimizing design of testing circuits.
【Fund】: 国家973资助项目(G1999033101)。
【CateGory Index】: TH703
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 Ruan Aiwu(Automatic Control Department, Northwestern Polytechnical University, Xi'an 710072)Li WanyuFeng Peide(Electronics & Information School, Xi'an Jiaotong University) (618 Research Institute of Aeronautics Industry Co.);Relationship Between Sensitivity of Silicon MicromechanicalTuning-Fork Gyroscopy and Its Natural Frequencies[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1998-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 LI Qian,LI Xiao-ying,CHANG Hong-long,JIANG Qing-hua (Micro/Nano System Laboratory, Northwestern Polytechnic University, Xi'an 710072 ,China);Study on the Circuit of Driving Loop Control for Micromachined Vibratory Gyroscope[J];Chinese Journal of Sensors and Actuators;2006-05
2 MA Zong-ming1,SHI Yun-bo1,LIU Jun1,21.National Key Lab for Electronic Measurement and Technology,Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education,North University of China,Taiyuan Shanxi 030051,China;2.Department of Mechanical Engineering University of California,Berkeley.Berkeley,CA,94720,USA;Design and Kinetic Analysis on Single-Chip Dual-Inertia Accelerometer Gyroscope[J];Chinese Journal of Sensors and Actuators;2007-11
3 WANG Jia,QIAN Liang,YANG Zhen-chuan,YAN Gui-zhen(National key laboratory of micro/Nano fabrication Institute of Microelectronics,Peking University,Beijing 100871,China);A System Level Simulation of Bulk Micromachined CMOS-MEMS Integrated Gyroscope[J];Chinese Journal of Sensors and Actuators;2008-04
4 WANG Jun-jie,CHE Lu-feng,LI Yu-fang,XIONG Bin,XIE Zheng,WANG Yue-lin(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem andInformation Technology,Chinese Academy of Science,Shanghai 200050,China);Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value[J];Transducer and Microsystem Technologies;2007-10
5 Che Lufeng Xiong Bin Wang Yuelin (State Key Lab. of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Science, Shanghai 200050);Equivalent Electrical Simulation of Micro Acceleration Sensor[J];Electro-mechanical Engineering;2002-02
6 Che Lufeng Xiong Bin Huang Xiaozhen Wang Yuelin (State Key Lab. of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China);EQUIVALENT ELECTRICAL SIMULATION OF MICROMACHINED GYROSCOPE'S OSCILLATING PROPERTIES[J];Journal of Electronics and Information Technology;2003-02
7 FU Sheng - rong, XIONG Bin, CHE Lu - feng, WANG Yue - lin (State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China);Research on the resolution of fence structure micro - gyroscope under large signal input[J];Journal of Functional Materials and Devices;2003-04
8 CHE Lufeng XIONG Bin HUANG Xi aozhen WANG Yuelin (State Key Lab.of Transducer Technology, Shanghai Institute of Micro system and Information Technology, Chinese Academy of Science, Shanghai , 200050, CHN);Mixed Simulation of Micromach ined Gyroscope's Sensor Model and Interfacing Circuits[J];Research & Progress of Solid State Electronics;2003-04
9 XU Yi-shen,WANG Shou-rong,SHENG Ping,JI Xun-sheng (Department of Instrument Science & Engineering,Southeast University,Nanjing 210096,China);Analysis and Design on the Closed-Loop Driving Circuit of Micromachined Vibratory Gyroscope[J];Measurement & Control Technology;2006-10
10 Xiong Bin Che Lufeng Huang Xiaozhen Wang Yuelin (State Key Lab.of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050,China);Electrical Simulation of a Micromachined Gyroscope's Self-excited Driving Mode[J];Chinese Journal of Scientific Instrument;2003-02
【Secondary Citations】
Chinese Journal Full-text Database 1 Hits
1 Ruan Aiwu(Automatic Control Department, Northwestern Polytechnical University, Xi'an 710072)Li WanyuFeng Peide(Electronics & Information School, Xi'an Jiaotong University) (618 Research Institute of Aeronautics Industry Co.);Relationship Between Sensitivity of Silicon MicromechanicalTuning-Fork Gyroscopy and Its Natural Frequencies[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1998-01
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