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《Chinese Journal of Mechanical Engineering》 2008-11
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Demolding Defects and the Design of Demolding Device in Micro Hot Embossing Process

HE Yong~(1,2) FU Jianzhong~(1,2) CHEN Zichen~(1,2) (1.College of Mechanical and Energy Engineering,Zhejiang University,Hangzhou 310027;2.Zhejiang Province Key Laboratory of Advanced Manufacturing Technology,Hangzhou 310027)  
The defects caused by auto/manual demolding are studied to get better imprint quality in micro hot embossing process. Finite element method(FEM)is used to simulate the demolding process of high aspect ratio microstructures.The results show that the stress concentration mainly occurs at the bottom of microstructures when the auto demolding device is used.The maximum demolding stress is generated during the initial stage and the defects are mainly necking and root fracture.Great stress concentration will be caused by concentration little demolding direction deviation in manual demolding,and that stress concentration will reach the maximum in the late stage of the demolding process.190 MPa stress can be caused due to 5°direction deviation,then the demolding defects are mainly microstracture topping and root fracture.So an auto demolding device is needed when fabricating high aspect ratio structures.A new pneumatic demolding device is designed to overcome the warp distortion of polymer substrate caused by the traditional demolding system.Successful fabricating of microstructures with an aspect ratio of 3.3 verifies the improvement of the demolding device.
【Fund】: 国家高技术研究发展计划(863计划,2002AA421150)资助项目
【CateGory Index】: TQ320.52
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【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 LIU Gang TIAN Yangchao (National Synchrotron Radiation Laboratory,University of Science & Technology of China,Hefei 230026);Research and Application of LIGA Process at Nationol Synchrotron Radiation Laboratory[J];Chinese Journal of Mechanical Engineering;2008-11
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Li Zhongquan; Zhou Guifen and Chen Mulan(Central Iron and steel Reseacch Institute,Beijing 100081 );DETERMINATION OF GAS PERMEABILITY OF POROUS MATERIALS[J];POWDER METALLURGY TECHNOLOGY;1996-01
2 Luo Minhua1 Zeng Lingke2(1 Jindezhen Ceramic Institute, Jindezhen,333000 2 Material Collage of South China University of Technology, Guangzhou,510640);Characterization and Testing Technology of Porous Ceramics[J];;2004-02
3 Xu Xiangzai;Zhai Qiulan(Chian-For- eign Joint Venture Wuxi Baolishi Petrochemical Accessories Co, Ltd);Measurement of pore size distribution and permeability of porous materials[J];ANALYTICAL INSTRUMENTATION;1999-04
4 LIU Jun~1, CHEN Zhi-gang~2(1. Jiangsu University, Zhenjiang 212013, China; 2. Jiangsu Institute of Technology, Changzhou 213016, China);Permeable Ceramics of Al_2O_3 with High Strength[J];Materials For Mechanical Engineering;2004-12
5 Xue Wei1, Jiang Wen2, Su Rongguo3 (1.Heilongjiang Provincial Institute of Measurement and Verification, Harbin 150036, China; 2.National Center of Agriculture Standardization Monitoring and Researching, Harbin 150036 , China; 3.College of Chemistry and Chemical Engineering, Ocean University of China, Qingdao 266100, China);DEVELOPMENT OF THE DETECTING TECHNIQUE FOR MICRO-FLUIDIC CHIP[J];Chemical Analysis and Meterage;2007-03
6 Wang Likai Feng Xizeng *(The Key Laboratory of Bioactive Materials, Ministry of Education, Nankai University, Tianjin 300071, China);Microfluidic Network for Research and Application in Life Sciences[J];Progress In Chemistry;2005-03
7 Tang Guohua Yang Junhe Zhang Zhuo and Zheng Jinbiao (Shanghai Institute of Technology,200235 Shanghai;* East China Universityof Science and Technology,200237 Shanghai);A NEW METHOD OF QUANTITATIVELY ANALYZING PORE STRUCTURE FROM POROUS MATERIALS[J];Coal Conversion;2004-01
8 ZHOU Zhao-yao,WU Zheng-qiang,HUANG Chun-man,XIA Wei(College of Mechanical Engineering,South China University of Technology,Guangzhou,510640,China);Effects of Mechanical Process on Pores of Sintered Porous Metal[J];Journal of Nanjing University of Aeronautics & Astronautics;2005-S1
9 HUANG Ju-hua, QIAN Ying-ping (College of Machinery Eng. , Hubei Polytechnic University, Wuhan 430068, China);Calculation of Initial Knockout Press in Injection Mould[J];China Plastics Industry;2007-S1
10 LI Heng, ZHANG Xi wen, HE Feng (Department of Engineering Mechanics, Tsinghua Universiry, 100084, Beijing, China);Measurement of Permeability and Inertial Coefficient for Porous Materials with the Consideration of Compressible Effects of Gas[J];Journal of Experimental Mechanics;2002-03
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