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《Physical Testing and Chemical Analysis Parta Physical Testing》 1998-02
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Kuang Tongchun (GuangDong University of Technology) Liu Zhengyi (South China University of Technology)  
The composite hardness of DLC (Diamond-Like Carbon) films deposited on different substrates under various process conditions has been measured by using microhardness tester on the basis of reviewing the methods and models available to evaluate the hardness of thin film or coating materials. The intrinsic hardness of various DLC films has been obtained through fit treatments of measured date by means of the empirical equation derived from FEM (Finite Element Model), The intrinsic hardness of DLC film/cemented carbide composite system is about 20GPa, the intrinsic hardness of DLC films deposited on silicon substrates under various process parameters is between 20~30GPa. A simple technique to obtain the intrinsic hardness of DLC films has been firstly proposed on the basis of using the Meyer law to modify the film/substrate composite system.
【CateGory Index】: O484.5
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