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《Journal of Liaoning University(Natural Sciences Edition)》 2007-04
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Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films

TAN Tian-ya,JIANG Xue,CUI Chun-yang,LI Chun-mei,XU Guang-wen,WU Wei,GUO Yong-xin (Shenyang Key Laboratory of Photoelectronic Devices and Detection Technology,College of Physics,Liaoning University,Shenyang 110036,China)  
Compared with the ITO thin film,ZnO-based transparent conductive thin film is not only similar to it in the performance,but also has the merits which are better than ITO.So the preparing of ZnO-based transparent conductive thin film becomes a hot topic.In this paper,a review on the progress of preparation methods of ZnO-based transparent conductive thin films is presented,and the advantages,disadvantages of deposition techniques are discussed in detail.
【Fund】: 辽宁大学科研启动基金资助项目(408041)
【CateGory Index】: TM24
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【References】
Chinese Journal Full-text Database 2 Hits
1 LIU Chang-lin1, WANG Jian-hua1,2, XIONG Li-wei1,2, WENG Jun1, WANG Wen-jun1, LI Yuan1, CHEN Guan-hu1 (1. Key Laboratory of Plasma Chemistry and Advanced Material, Wuhan Institute of Technology, Wuhan 430073, China; 2. Institute of Plasma Physics, Chinese Academy of Science, Hefei 230031, China);RECENT PROGRESS ON PREPARATION AND P-TYPE DOPING OF ZnO FILMS[J];Vacuum and Cryogenics;2009-02
2 ZHOU Ji-cheng,LI Li(School of Physics Science and Technology,Central South University,Changsha 410083,China);Effects of sputtering pressure on electrical and optical properties of transparent conducting ZnO thin film[J];The Chinese Journal of Nonferrous Metals;2009-07
【Citations】
Chinese Journal Full-text Database 10 Hits
1 GUO Ai-yun, XUE Yi-yu, XIA Zhi-lin, ZHU Xuan-min, GE Chun-qiao {School of Material and Engineering, Wuhan University of Technology, Wuhan 430070, China);Electron Beam Evaporation Deposited ZAO Thin Films by Orthogonal Experiment[J];Semiconductor Technology;2005-07
2 LIU Jia-yu1,2,YANG Rui-xia1,NIU Chen-liang1,XUE Jun-ming2,ZHAO Ying2,GENG Xin-hua21.School of Information Engineering,Hebei University of Technology,Tianjin 300130,China;2.Institute of Photo-Electronic Thin Film Devices and Technique of Nankai University,Key Laboratory of Photoelectronics Thin Film Devices and Technique of Tianjin,Key Laboratory of Optoelectronic Information Science and Technology,Chinese Ministry of Education,Tianjin 300071,China;Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering[J];Micronanoelectronic Technology;2006-04
3 Zhu Shunming,Ye Jiandong,Gu Shulin ,Liu Songmin,Zheng Youdou,Zhang Rong,and Shi Yi(Key Laboratory of Photonic and Electronic Materials Science and Technology of Jiangsu,Department of Physics,Nanjing University,Nanjing 210093,China);MOCVD Growth and Properties of Ga-Doped ZnO Films[J];Chinese Journal of Semiconductors;2005-08
4 CHEN Yuan 1\ ZHANG Deheng 1\ MA Jin 2\ YANG Tianlin 3 (1. Department of Physics, Shangdong University, 250100;\ 2. Institute of Optoelectronic Materials and Devices,Shandong Unversity, 250100;\ 3. Zibo Inctitute, 255200);Study of Transparent Conducting ZnO∶Al Films Prepared on Different Organic Substrate[J];;1999-03
5 Wang Wenwen Diao Xungang Wang Zheng Wang Tianmin (School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China);Optical, electrical and infrared emissing properties of DC magnetron sputtered ZnO:Al thin films[J];Journal of Beijing University of Aeronautics and Astronautics;2005-02
6 LU Feng 1,2, XU Cheng-hai2, WEN Li-shi3, CAO Hong-tao3, PEI Zhi-liang3, SUN Chao3 (1.School of Traffic and Mechanical Engineering,Shenyang Architecture University,Shenyang 110168; 2. School of Mechanical Engineering & Automation, Northeastern University,Shenyang 110004;3.Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110015,China).;Comparison of Performance of Transparent Conducting ZnO:Al(ZAO) Thin Films on Transparent Glass and Organic Plastic Substrates[J];Materials Protection;2005-07
7 WANG Lei (State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China);Advances in Research on Deposition Techniques for ZnO Thin Films[J];Materials Review;2002-09
8 WANG Hua (Department of Information Material Science and Engineering,Guilin University of Electronic Technology,Guilin 541004);Distinctive Functional Material——Transparent Conductive Oxide Thin Films[J];Materials Review;2005-11
9 Fan Zhixin[WT5BX] (Department of Applied Physics, Hebei University of Technology, Tianjin, 300130);Properties and Preparation and Application of AZO Transparent Conducting Thin Films[J];Optoelecfronic Technology;2000-04
10 XU Bu-heng~(), XUE Jun-ming, ZHAO Ying, ZHANG Xiao-dan, WEI Chang-chun, SUN Jian, LIU Fang-fang, HE Qing, HOU Guo-fu, REN Hui-zhi, ZHANG De-kun, GENG Xin-hua (Institute of Photo-electronics Thin Film Devices and Technique of Nankai University,Key Laboratory of Photo-electronics Thin Film Devices and Technique of Tianjin,Key Laboratory of Opto-electronic Information Science and Technology EMC,Tianjin 300071,China);Research on ZnO Thin Films Prepared by MOCVD for Solar Cells[J];Journal of Optoelectronics.laser;2005-05
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 LI Cun,QUAN Chuan-bin,XU Hong-yao,HE Jin-hua,ZHANG Xian-li (The Key Laboratory of Environment-friendly Polymer Materials of Anhui Province,School of Chemistry and Chemical Engineering,Ahhui University,Hefei 230039,China);Recent development in the thin films of ZAO(ZnO∶Al)[J];Journal of Anhui University(Natural Sciences);2007-05
2 ZHOU Qiang,JI Zhen-guo,ZHAO Li-na,CHEN Chen,WANG Chao(State Key Laboratory for Silicon Materials,Zhejiang University,Hangzhou 310027,CHN);P-type Transparent Conducting Copper Aluminum Oxide Films with Different Cu/Al Ratio[J];Semiconductor Optoelectronics;2005-06
3 YANG Bing-chu,MA Xue-long,ZHANG Li,YAN Jian-tang(College of Physics Science and Technology,Central South University,Changsha 410083,CHN);Preparation of p-type Transparent Conducting Cu-Al-O Films by DC Co-sputtering[J];Semiconductor Optoelectronics;2008-05
4 LI Xiang-ping1,ZHANG Bao-lin1,SHEN Ren-sheng2,DONG Xin2,DU Guo-tong1,2(1.State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,CHN;2.State Key Laboratory for Materials Modification by Laser,Ion,and Electron Beams,School of Physics and Optoelectronic Technology,Dalian University of Technology and Science,Dalian 116024,CHN);Orthogonal Design for Fabrication of ZnO Thin Films by MOCVD[J];Semiconductor Optoelectronics;2008-05
5 LV Jian-guo1,2,SONG Xue-ping1,SUN Zhao-qi1(1.School of Physics and Material Science,Anhui University,Hefei 230039,CHN;2.Department of Physics and Electronic Engineering,Hefei Teachers College,Hefei 230061,CHN);Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process[J];Semiconductor Optoelectronics;2009-01
6 Zhang Huafu,Yuan Yuzhen,Liu Hanfa,Liu Yunyan (School of Physics and Optic-Electronic Information,University of Technology of Shandong,Zibo 255049,China);Advancement of Al Doped ZnO Flexible Transparent Conducting Thin Film[J];Semiconductor Technology;2008-06
7 Ji Zhenguo1,2,Wu Qiuhong1,Mao Qinan2(1.College of Electronic Information,Hangzhou Dianzi University,Hangzhou 310018,China;2.State Key Laboratory for Silicon Materials,Zhejiang University,Hangzhou 310027,China);Flexible and Transparent Conducting CdO Films Deposited by RF Magnetron Sputtering[J];Semiconductor Technology;2010-12
8 Liang Qinga,b,c,Xu Ganga,b,Zhen Enminga,b,c,Chen Lihuaa,b,Miao Leia,b(a.Guangzhou Institute of Energy Conversion;b.Key Laboratory of Renewable Energy and Gas Hydrate,Chinese Academy of Sciences,Guangzhou 510640,China;c.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China);Effects of Transparent Conductive Films on the Thermal Performance of Solar Flat-Plate Collectors[J];Micronanoelectronic Technology;2008-11
9 Li Ying 1, ,Feng Shiwei1,Yang Ji1,Zhang Yuezong1,Xie Xuesong1, Lü Changzhi1,and Lu Yicheng2(1 School of Electronic Information & Control Engineering,Beijing University of Technology,Beijing 100022,China) (2 Department of Computer and Electrical Engineering,Rutgers University,Piscataway,NJ 08854,USA);Photoresponse of ZnO Single Crystal Film[J];Chinese Journal of Semiconductors;2006-01
10 Wang Wenwen Diao Xungang Wang Zheng Wang Tianmin (School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China);Optical, electrical and infrared emissing properties of DC magnetron sputtered ZnO:Al thin films[J];Journal of Beijing University of Aeronautics and Astronautics;2005-02
China Proceedings of conference Full-text Database 7 Hits
1 Zhang Junshuang and Ye Qin (Department of Physics,Jinan University,Guangzhou,Guangdong,510632);Advancement of Al-doped ZnO Transparent Conducting Thin Films[A];[C];2009
2 XIAO Hua, WANG Hua, REN Ming-fang, Chen Guo-hua (Guilin Institute of Electronic Technology, Guilin 541004, China);Research and development of aluminum doped ZnO transparent conductive oxide films and target by magnetron-sputtering[A];[C];2005
3 Wang Tao Diao Xungang Ding Peng Shu Yuanjie Wu Zhe (School of Science, Beijing University of Aeronautics & Astronautics, Beijing 100083; Institute of Chemical Materials, CAEP, Mianyang, Sichuan 621900; School of Aeronautic Science and Technology, Beijing University of Aeronautics & Astronautics, Beijing 100083);Preparation and Properties of Transparent Conductive ZnO:Al Films by DC Magnetron Sputtering at Low Substrate Temperature[A];[C];2006
4 Liu Jin-biao Xue Jun-ming Xu Bu-heng Zhou Zhen-hua Sun Jian Zhao Ying Geng Xin-hua (Institute of photo-electronic thin film device and technique of Nankai University) (Key Laboratory of photo-electronic thin film device and technique of Tianjin) (Key Laboratory of photo-electronic Information Science and Technology, Ministry of Education) Tianjin, 300071, China;Preparation of ZnO:Al films by Mid-frequency Sputtering[A];[C];2004
5 Lin Oinggeng,Gao Xiaoyong~*,Feng Hongliang,Chen Yongsheng,Yang Shie,Gu Jinghua, Lu Jingxiao (The Key Lab of Material Physics of Ministry of Education,Zhengzhou University,Zhengzhou 450052,China);STUDY ON THE PROPERTIES OF AL-DOPED ZINC OXIDE FILMS[A];[C];2008
6 Zhao Daqing Fan Jinpeng Dong Mincao Deptment of Mechanical Engineering,Tsinghua UniversityBeijing 100084;Research on basic sintering processes of ZAO target[A];[C];2001
7 Fu Guangzong Yang Fengfan Yang Xiaohong Liao Kejun Liu Gaobin Chongqing University .Chongqing, 400044 Chongqing Normal University, Chongqing,400047;Study on Transmittance Property on Ultrathin Aluminum Film[A];[C];2005
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 REN Mingfang1,FENG Xiang2,WANG Hua1,XU Jiwen1(1.School of Material Science and Engineering,Key Laboratory of Information Materials of Guangxi,Guilin University of Electronic Technology,Guilin 541004,China;2.Department of Electromechanical Engineering,Zhengzhou Railway Vocational & Technical College,Zhengzhou 450052,China);Influence of doping content and sputtering power on the structure and resistivity of ZnO:Al thin films[J];Ordnance Material Science and Engineering;2010-02
2 GUO Ai-yun, XUE Yi-yu, XIA Zhi-lin, ZHU Xuan-min, GE Chun-qiao {School of Material and Engineering, Wuhan University of Technology, Wuhan 430070, China);Electron Beam Evaporation Deposited ZAO Thin Films by Orthogonal Experiment[J];Semiconductor Technology;2005-07
3 LI Shi-ping,LI Ling (Physical Department of Jinan University,Guangzhou 510632, China );Optical and Electrical Characteristics of Al Doped Zinc Oxide Thin Films Prepared by Sol-Gel[J];Semiconductor Technology;2006-10
4 CHEN Xiao-qing,XIE Zi-li,ZHANG Rong,XIU Xiang-qian,GU Shu-lin,HAN Ping,SHI Yi,ZHENG You-dou(Jiangsu Provincial Key Laboratory of Photonic and Electronic Materials Science and Technology,Department of Physics,Nanjing University,Nanjing 210093,China);Influences of annealing temperature on the structure and luminescence of nanometer ZnO films[J];Micronanoelectronic Technology;2004-11
5 LIU Jia-yu1,2,YANG Rui-xia1,NIU Chen-liang1,XUE Jun-ming2,ZHAO Ying2,GENG Xin-hua21.School of Information Engineering,Hebei University of Technology,Tianjin 300130,China;2.Institute of Photo-Electronic Thin Film Devices and Technique of Nankai University,Key Laboratory of Photoelectronics Thin Film Devices and Technique of Tianjin,Key Laboratory of Optoelectronic Information Science and Technology,Chinese Ministry of Education,Tianjin 300071,China;Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering[J];Micronanoelectronic Technology;2006-04
6 Chen Changchun,Liu Ping,Wang Lurong (College of Materials Science and Engineering,Nanjing University of Technology,Nanjing 210009,China);Research Progress in Fabrication of p-Type ZnO Films[J];Micronanoelectronic Technology;2008-06
7 Lü Jianguo,Ye Zhizhen,Huang Jingyun,Zhao Binghui and Wang Lei(State Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 310027,China);Influence of Postdeposition Annealing on Crystallinity of Zinc Oxide Films[J];Chinese Journal of Semiconductors;2003-07
8 Li Jianguang;Ye Zhizhen; Zhao Binghui and Yuan Jun (State Key Asb.of Silicon Materials,Zhejiang University, Hangzhou 310027)Received 10 March 1996, revised manuscript received 4 May 1996;Preparation and Characterization of High-Quality ZnO Film on Silicon Substrate by DC Reactive Magnetron Sputtering[J];CHINESE JOURNAL OF SEMICONDUCTORS;1996-11
9 Zhang Deheng ( Department of Physics, Shandong University, Jinan, 250100);Shift of Optical Absorption Edgesin Transparent Conducting Films[J];;1998-03
10 HUANG Yu~(1,2),XIONG Qiang~3,XUE Jun-ming~2,MA Tie-hua~1,SUN Jian~2,ZHAO Ying~2,GENG Xin-hua~2(1.Key Lab of Instrumentation Science and Dynamic Measurement of Ministry of Education,Department of Electronic Engineering,North University of China,Taiyuan 030051,Shanxi,China;2.Key Laboratory of Optoelectronic Information Science and Technology,Chinese Ministry of Education,Institute of Photo-Electronic Thin Film Devices and Technique of Nankai University,Nankai University,Tianjin 300071,China;3.Wireless Management Substation of Tangshan,Information Industry Office of Hebei Province,Tangshan 063000,Hebei,China);Substrate Temperature Dependence of the Properties of ZnO∶Al Thin Films Prepared by Mid-frequency Sputtering[J];Acta Armamentarii;2006-05
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 GUO Mei-xia (School of Science,Shandong University of Technology,Zibo 255049,China);Preparation and Characterization of Al-Ti Co-Doped Zinc Oxide Films[J];Chinese Journal of Liquid Crystals and Displays;2011-02
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Zhao Xiequn,Qiu Xiangdong (General Research Institute for Nonferrous Metals,Beijing 100088) Lin Hongyi (Electronic Engineering Department,Beijing University of Technologies,Beijing 100081);Development and Applications for Zinc Oxide Thin Film[J];SEMICONDUCTOR TECHNOLOGY;1998-06
2 YE Zhi-zhen,CHEN Han-hong,LIU Rong,ZHANG Hao-xiang and ZHAO Bin-hui(National Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 3100 27,China);Structure and PL Spectrum of ZnO Films Prepared by DC Reactive Magnetron Sputtering[J];Chinese Journal of Semiconductors;2001-08
3 CHEN Yuan 1\ ZHANG Deheng 1\ MA Jin 2\ YANG Tianlin 3 (1. Department of Physics, Shangdong University, 250100;\ 2. Institute of Optoelectronic Materials and Devices,Shandong Unversity, 250100;\ 3. Zibo Inctitute, 255200);Study of Transparent Conducting ZnO∶Al Films Prepared on Different Organic Substrate[J];;1999-03
4 Zhang Deheng ( Department of Physics, Shandong University, Jinan, 250100);Shift of Optical Absorption Edgesin Transparent Conducting Films[J];;1998-03
5 WANG Min, MENG Ji-long(Department of Mechano - electronic Engineering, South China University of Technology, Guangzhou 510640, China);Development of Transparent Conductive Oxide Films[J];Surface Technology;2003-01
6 Pan Suying Mei Sen(Wuhan Institute of Technology);ZnO Gas -Sensitive Films Prepared Through Sol -Gel Process[J];Journal of Transducer Technology;1993-03
7 GE Shui\|bing, CHENG Shan\|hua, NING Zhao\|yuan (Films material laboratory of Suzhou university, Suzhou\ 215006,China);Investigation on Characters and Preparation of ZnO:Al Thin Film[J];MATERIALS SCIENCE AND ENGINEERING;2000-03
8 WANG Jin\|ku, CHENG Jun, LIN Wei\|wei (Dept.of Polymer Sci.& Eng.Zhejiang University, Hangzhou\ 310027,China);Research Progress of Transparent Conductive Polyaniline Composite Films[J];Materials Science and Engineering;2001-01
9 Li Jianguang\ Ye Zhizhen \ Zhao Binhui State Key Laboratory of Silicon Zhejinag University Hangzhou 310027;Progress of Study on ZnO Thin Film[J];MATERIALS SCIENCE AND ENGINEERING;1997-02
10 Ni Xingyuan\ Wu Yonggang\ Wu Guangming\ Zhou Zen Zhang Huiqin\ Jin ZheminTongji University\ Shanghai\ 200092;Influence of RF Sputtering Condition on ZnO Transparent Conducting Film.[J];MATERIALS SCIENCE AND ENGINEERING;1998-02
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