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Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films

TAN Tian-ya,JIANG Xue,CUI Chun-yang,LI Chun-mei,XU Guang-wen,WU Wei,GUO Yong-xin (Shenyang Key Laboratory of Photoelectronic Devices and Detection Technology,College of Physics,Liaoning University,Shenyang 110036,China)  
Compared with the ITO thin film,ZnO-based transparent conductive thin film is not only similar to it in the performance,but also has the merits which are better than ITO.So the preparing of ZnO-based transparent conductive thin film becomes a hot topic.In this paper,a review on the progress of preparation methods of ZnO-based transparent conductive thin films is presented,and the advantages,disadvantages of deposition techniques are discussed in detail.
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