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《Tribology》 2014-06
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Preparation and Tribological Properties in Water of Si-DLC Film with Gradient Interlayer Deposited by Muti-Power Source Technology

WU Xing-yang;DENG Zhao-xing;HUANG Yi-ming;HUA Zi-kai;ZHANG Jian-hua;School of Mechatronic Engineering and Automation,Shanghai University;  
A gradient interlayer was deposited on stainless steel disk and silicon wafer by RF-CVD assisted sputtering and reactive sputtering method. Sequentially,a Si-DLC film was deposited on the interlayer by RF-CVD. The effect of the interlayer on the characteristics and tribological behaviors in water of the film was investigated. The results show that the presence of the gradient interlayer increased the content of sp3 carbons as well as the hardness and the Young's Modulus of Si-DLC slightly. The Si-DLC film with gradient interlayer showed higher failure-resistant capability comparing with the film without gradient interlayer.
【Fund】: 国家自然科学基金(51075250)资助;; 基恩士(中国)有限公司在表面形貌测试方面给予了大力协助~~
【CateGory Index】: TB383.2
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