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《MICROELECTRONICS》 1999-05
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An Investigation into Interface Detection Technology for Micromachined Si Gyroscopes

LI Wan yu 1,RUAN Ai wu 2,LUO Jin sheng 3,FENG Pei de 1 (1.No 618 Research Institute, Aeronautics Industry Co , Xi’an, Shaanxi 710065; 2.Dept Automatic Control, Northwestern Polytechnical University, Xi’an, Shaanxi 71007  
The sensing technology for weak output signals in detection circuitry of gyroscopes whose capacitance change rate ranges from 10 -7 ~10 -8 is investigated, which is a technical challenge for micromachined devices Based on the integrator of basic readout approach, improved sensing strategies with correlated double sampling are adopted, which can suppress low frequency noises and offset, and cancel charge injection induced by switches These novel technical ideas and schemes are expected to satisfy the requirements for detecting the capacitance change rate ranging from 10 -7 ~10 -8
【CateGory Index】: V241.5
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【References】
Chinese Journal Full-text Database 7 Hits
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【Co-references】
Chinese Journal Full-text Database 6 Hits
1 ZENG Hui, ZHOU Bai-ling, SU Yan, XIA Dun-zhu (Dept of Instr Sci and Engin,Southeast University,Nanjing 210096,China);Research on feedback control system of sense signal in micromachined gyroscope[J];传感器技术;2005-03
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6 Li WanyuRuan Aiwu*Luo Jinsheng#Feng Peide (No.618 Research Institute, Aeronautics Industry Co.,Xi'an T5HZ710065 ) (Automatic Control Department,Northwestern Polytechnical University)*(Electronics & Information School,Xi'an Jiaotong University;Detection Technology for Micromachined Gyroscopes[J];传感器技术;1999-03
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