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An Investigation into Interface Detection Technology for Micromachined Si Gyroscopes

LI Wan yu 1,RUAN Ai wu 2,LUO Jin sheng 3,FENG Pei de 1 (1.No 618 Research Institute, Aeronautics Industry Co , Xi’an, Shaanxi 710065; 2.Dept Automatic Control, Northwestern Polytechnical University, Xi’an, Shaanxi 71007  
The sensing technology for weak output signals in detection circuitry of gyroscopes whose capacitance change rate ranges from 10 -7 ~10 -8 is investigated, which is a technical challenge for micromachined devices Based on the integrator of basic readout approach, improved sensing strategies with correlated double sampling are adopted, which can suppress low frequency noises and offset, and cancel charge injection induced by switches These novel technical ideas and schemes are expected to satisfy the requirements for detecting the capacitance change rate ranging from 10 -7 ~10 -8
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