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《Microelectronics》 2005-06
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Analysis and Improvement of an Interface Circuit for Humidity Sensor

CHENG Kun,QIN Ming,ZHANG Zhong-ping,HUANG Qing-an(Key Laboratory of MEMS under Ministry of Education,Southeast University,Nanjing,Jiangsu 210096,P.R.China)  
A new integrated humidity sensor is dealt with.The humidity-sensitive capacitance and the interface are integrated into one chip.The interface circuit,which is based on the Schmitt trigger,works as a capacitor-frequency converter.The capacitor and the relative humidity satisfied a linear relationship during testing,but the duty cycle of the output waveform displayed a large difference from theoretic calculation.The reason for the difference is analyzed.Circuit schematic and parameters are redesigned to realize the integration with a new humidity sensor designed in our laboratory.
【Fund】: 国家自然科学基金资助项目(60476019);; 江苏省自然科学基金资助项目(BK2003052)
【CateGory Index】: TP212
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