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《Nanotechnology and Precision Engineering》 2006-02
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Capacitance Sensor Measurement Method for Micro-Aperture

SUN Chang-ku, WANG Xiao-bing, LIU Bin, ZHENG Yi-zhong (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)  
The working principle of capacitance sensor is analyzed, its mathematical model for measuring micro-aperture is deduced and the system is constructed. The manufacturing process of a φ3 mm sensor and its system calibration method are presented. After calibrated, the measurement system can give the aperture of small hole directly on the computer through USB interface combined with the software and the system resolution can reach 0.01 μm.
【CateGory Index】: TG81
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2 ;New Method of Signal Conditioning for Capacitance Transducer[J];Process Automation Instrumentation;2005-03
Chinese Journal Full-text Database 7 Hits
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China Proceedings of conference Full-text Database 1 Hits
1 LIANG Sheng HUANG zhao hong Laboratory of Photonic Information Technology , SCNU, Guangzhou China;A Design of Contactless Capacitance Angle Sensor[A];[C];2006
Chinese Journal Full-text Database 10 Hits
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7 ;Linear Treatment and Non-Linearity Compensation for Sensor Signal[J];Electronic Engineer;2002-01
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【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 WEI Liejiang1 JI Hong1 LI Shaonian1 QIANG Yan1 WEI Zhongying2 (1. College of Flow Power and Control Engineering, Lanzhou University of Technology, Lanzhou 730050; 2. Lanzhou Lanfei Medical Instrument Co. Ltd., Lanzhou 730070);Non-steady Flow Method for Measuring the Micro Flow at Constant Micropressure[J];Journal of Mechanical Engineering;2009-05
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