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《Nanotechnology and Precision Engineering》 2006-02
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Capacitance Sensor Measurement Method for Micro-Aperture

SUN Chang-ku, WANG Xiao-bing, LIU Bin, ZHENG Yi-zhong (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)  
The working principle of capacitance sensor is analyzed, its mathematical model for measuring micro-aperture is deduced and the system is constructed. The manufacturing process of a φ3 mm sensor and its system calibration method are presented. After calibrated, the measurement system can give the aperture of small hole directly on the computer through USB interface combined with the software and the system resolution can reach 0.01 μm.
【CateGory Index】: TG81
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【Citations】
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【Co-citations】
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1 WU Yangping,TENG Zhaosheng,LIN Haijun,CHI Hai (Electrical and Information Engineering College,Hunan University,Chang'sha 410082,China);Automatic Liquid Level Detection Method for Capillary-Gravity Viscometer Based on Capacitance Sensors[J];Chinese Journal of Sensors and Actuators;2009-07
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7 CHEN Wei-min1,QIAN Xiao-yao1,HU Xing-fu2(1.College of Mechatronics Engineering,China Jiliang University,Hangzhou 310018,China;2.Hangzhou Detai Precision Measurement Instrument Co.Ltd.,Hangzhou 310034,China);Design of multi-point real-time monitoring system for water-in-oil percentage[J];Journal of China Jiliang University;2007-02
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1 LIANG Sheng HUANG zhao hong Laboratory of Photonic Information Technology , SCNU, Guangzhou China;A Design of Contactless Capacitance Angle Sensor[A];[C];2006
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