Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Nanotechnology and Precision Engineering》 2009-03
Add to Favorite Get Latest Update

Doubly-Decoupling Mechanism of a Fully-Symmetrical Micromachined Gyroscope

CHEN Wei-ping,CHEN Hong,GUO Yu-gang,XU Peng,LIU Xiao-wei(MEMS Center,Harbin Institute of Technology,Harbin 150001,China)  
To realize matched resonant frequencies and doubly-decoupling mechanism,a fully-symmetrical and doubly-decoupled silicon bulk micromachined gyroscope was presented.The fully-symmetrical structure enables the matched resonant frequencies for the drive and sense modes.The doubly-decoupling mechanism is implemented by four sets of cross-folded-flexures.Simulation results indicate that the coup ̄ling coefficient is less than 0.17%.In addition,to obtain high quality factor in atmospheric pressure,the main damping effect of both modes is slide-film-damping.This gyroscope was fabricated with bulk micromachining technology,the key process of which was silicon-glass anodic bonding and DRIE technology.The decoupling mechanism of the gyroscope was experimentally verified using computer vision technology.The measured quality factor is 195 at atmospheric pressure,with the angular rate sensitivity of 8.031 mV/((°)·s-1).
【CateGory Index】: TH703
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved