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Design of elastic bearing mechanism in step height contact measuring instrument

BAI Lifen, LI Qingxiang, XUE Shifu, WANG Yunqing (Department of Pricision Instrument and Mechanology, Tsinghua University, Beijing 100084, China)  
The measuring mechanism is the key part of a step height contact measuring instrument which uses a lever mechanism with two crossed elastic bearings to measure the step height. The mechanisim design was improved by contructing a simplified mathematical model to theoretically design the mechanism. Since the simplified model introduced some errors into the specifications of the measuring mechanism, Algor FEM software was used to simulate and analyze the design result. The FEM model used 8 node hexahedrons. The simulation result shows that the largest measuring force is 8.267N, the force change ratio is 33.8N/m and the offset of the bearing torsion center is 1μm. Thus, the measuring mechanism meets the need for high precision step height contact measurements.
【Fund】: 国家“八五”科技攻关项目 !(85 - 70 4- 0 2 - 11) ;; 国家自然科学基金项目 !(5 9875 0 5 2
【CateGory Index】: TN407
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