Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of Tsinghua University(Science and Technology)》 2003-08
Add to Favorite Get Latest Update

Computation of electrostatic forces with edge effects for non-parallel comb-actuators

LI Yong, LI Yuhe, LI Qingxiang, ZI Yanyang(Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China)  
The formulas for the capacitance and electrostatic force in a nonparallel combdrive actuator were derived to accurately predict the electrostatic force. In actual electrostatically actuated microelectromechanical devices, the capacitance edge effects are very significant, which greatly alter the electrostatic force. Therefore, the equations for the electrostatic force include the edgeeffect for parallel and nonparallel combdrives. The equations compare well with the results of a 3D finite element method simulation. Therefore, the equations including the edgeeffects can be used when parallel capacitor models are not sufficiently accurate.
【Fund】: 清华大学机械工程学院研究基金
【CateGory Index】: O441
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 8 Hits
1 ZHAO Jian,WANG Hong-xi,JIA Jian-yuan (School of Electro-Mechanical Engineering,Xidian University,Xian 710071,China);Computation of Electrostatic Forces with Edge Effects for Micro-Structures[J];Micronanoelectronic Technology;2006-02
2 LI Yang,XU Gao-bin (School of Science,Hefei University of Technology,Hefei 230009,China);Novel Electrostatic Microrelay with Parallel-Comb Drive[J];Micronanoelectronic Technology;2007-Z1
3 LU Jing,XIANG Yu,YUAN Li-yun,MA Xiao-qiang(Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China);Analysis of dynamic characteristics of torsion micromirrors with edge effects[J];Transducer and Microsystem Technologies;2008-09
4 LIU Hai-cang1,TENG Zhao-sheng1,LIU Jing-bo2,XIONG Hai-tao1,LUO Bin1(1.School of Electrical and Information Engineering,Hunan University,Changsha 410082,China; 2.Changsha High-tech Development Zone,YiQi Measurement and Control Technology Corporation, Changsha 410082,China);Design of digital sensor for oil quality detection based on AD7745[J];Transducer and Microsystem Technologies;2011-09
5 LU Jing,XIANG Yu,YUAN Li-yun,MA Xiao-qiang (Department of Automobile Engineering of Guangxi University of Technology,Liuzhou 545006,China);ANALYSIS OF ELECTROSTATIC MECHANICAL CHARACTERISTICS OF MICRO-MIRROR WITH EDGE EFFECTS[J];Engineering Mechanics;2008-07
6 YUAN Li-yun1,LIANG Zhi-da1,2,LU Jing1,WEI Xiao-mei1(1.Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China;2.School of Civil Engineering & Architecture,Guangxi University,Nanning 530004,China);The influence of edge effects on the static characteristics of a micromirror[J];Journal of Guangxi University of Technology;2007-04
7 Qiu Yu,Li Changyou,Xu fengying,Mai Zhiwei(College of Engineering,South China Agricultural University,Guangzhou 510642,China);Design of Capacitance Grain Moisture Detector[J];Journal of Agricultural Mechanization Research;2013-01
8 YUANLi-yun, XIANG Yu, LU Jing( Dept of Automobile Engineering, Guangxi University of Technology, Liuzhou 545006, China);ANALYSIS ON DYNAMIC CHARACTERISTICS OF TORSIONAL MICROMIRROR MODEL WITH CONSIDERATION OF EDGE EFFECTS[J];Journal of Vibration and Shock;2007-12
China Proceedings of conference Full-text Database 2 Hits
1 Zhao Jian Kang Chunxia JIA Jianyuan (School of Electro-Mechanical Engineering,Xidian University,Xi'an 710071,P.R.China);Computation of electrostatic forces with edge effects for micro-structures[A];[C];2005
2 LI Yang XU Gao-bin (School of Science,Hefei University of Technology,Hefei 230009,China);Novel Electrostatic Microrelay with Parallel-Comb Drive[A];[C];2007
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Qin Depei(Departmcnt of Physics,Chongqing University, Chongqing,Sichuan,630044, China );A SIMPLIFIED CALCULATION OF THE ELECTRIC FIELD AND THE CAPACITANCE FOR A NON-PARALLEL PLATE CAPACITOR[J];COLLEGE PHYSICS;1995-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 ;The Simulation of Strong Electromagnetic Pulse[J];Safety & Emc;2002-06
2 WANG Lei (Anyang Institute of Technology,Anyang 455000,China);Application of Conformal Transformation to Capacitors Calculation[J];Journal of Anyang Institute of Technology;2008-04
3 Chen Yazhou Liu Shanghe Wei Guanghui Wei Ming(Ordnance Engineering College);DEVELOPMENT OF A LIGHTNING ELECTROMAGNETIC PULSE(LEMP) SIMULATION DEVICE[J];ACTA ARMAMENTARII;2000-01
4 Lan Youguo;Numerical Analysis Method And New Application Of The TEM Cell[J];JOURNAL OF BEIJING BROADCASTING INSTITUTE;2000-01
5 HUANG Zhi-Xun(Communication University of China,Beijing 100024);Study of Surface-Wave Guiding Structure[J];Journal of Beijing Broadcasting Institute;2005-03
6 HUANG Zhi-Xun(Communication University of China,Beijing 100024,China);The Design Theory of Evanescent Mode Waveguide Filter[J];Journal of Communication University of China(Science and Technology);2006-03
7 HUANG Zhi-Xun(Communication University of China,Beijing 100024);Advances in Wave Mechanics Research[J];Journal of Communication University of China(Science and Technology);2008-04
8 ZHANG Li,ZHANG Jian (Basis Department,Aviation University of Air Force,Changchun 130022,China);Study on Seeking for the Capacitance of a Capacitor with Differential Element Method[J];Journal of Changchun Normal University(Natural Science);2009-10
9 XIE Dong,LI Chang-xi(Department of Control Science & Engineering,Huazhong University of Science and Technology,Wuhan 430074,China);Research on Uniplanar Scattering-Field Capacitive Sensors for Measuring the Water Content in Sand[J];Chinese Journal of Sensors and Actuators;2008-12
10 PAN Xiaodong1,WEI Guanghui1,REN Xinzhi2 (1.Electrostatic and Electromagnetic Protection Institute,Ordnance Engineering College,Shijiazhuang 050003,China;2.Teaching Administrative Section,Training Department,Ordnance Engineering College,Shijiazhuang 050003,China);Simulation Research on Electric Field Distribution In Bounded-Wave Simulator[J];Journal of Test and Measurement Technology;2007-05
China Proceedings of conference Full-text Database 4 Hits
1 YIN Wen-lu,DENG Cong CHAI Shun-lian,MAO Jun-jie (College of Electronic Science and Engineering School,NUDT,Chang'sha 410073,China);The Design of a Microstrip Antenna Array Fed by Rectangular Coaxial Line[A];[C];2007
2 Wen Hua-Feng Jin Wei Hu Qian-Miao Communication Technology Institute,Ningbo University,315211;Modeling and Simulating of VDSL2 Channel Based on Transmission Line Theory[A];[C];2007
3 WANG Jian (Baoshan National Climate Observatory of Shanghai,Shanghai 201901);Typical Fault Troubleshooting Methods for the Antenna Tracking System about Model GFE (L) 1 Wind-finding Secondary Radar[A];[C];2012
4 WANG Deyu Luoyang Optoelectro Technology Development Center,Luoyang,Henan 471009,China;Coaxial line characteristic analyse and measure[A];[C];2012
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 LI Shuan-qing; FU Shi-ping (The 13th Electronic Research institute, Shijiazhuang 050051, China);Microelectromechanical system[J];Semiconductor Technology;2001-08
2 ZHU Jian1,2(1.Dept. of Instrument Science and Engineering , Southeast University2.No. 55 Institute of China Electronics Technology Group Corporation, Nanjing 210016,China);Development and applications of MEMS technology[J];Semiconductor Technology;2003-01
3 WANG Hai-ning,WANG Shui-di,CAI Jian,JIA Song-liang(Institute of Microelectronics,Tsinghua University,Beijing 100084,China);Advanced packaging technology for MEMS[J];Semiconductor Technology;2003-06
4 ZHANG Peng,LIU Gang,TIAN Yang-chao (National Synchrotron Radiation Laboratory University of Science and Technology of China,Hefei230029,China);Prime study of an electromagnetic microrelay fabricated by UV-LIGA technology[J];Semiconductor Information;2002-04
5 HU Xiao-dong (Hebei Semiconductor Research Institute,Shijiazhuang050051,China);Failure mode and mechanism of a MEMS relay[J];Semiconductor Information;2002-10
6 ZHAO Jian,WANG Hong-xi,JIA Jian-yuan (School of Electro-Mechanical Engineering,Xidian University,Xian 710071,China);Computation of Electrostatic Forces with Edge Effects for Micro-Structures[J];Micronanoelectronic Technology;2006-02
7 WANG Min,WANG Xiao-jing,LIU Yong-wu,CHEN Xiao-yang (School of Mechatronics and Automation,Shanghai University,Shanghai 200072,China);Simulation of Laterally Oscillating Microresonators[J];Micronanoelectronic Technology;2006-02
8 LI Yang,XU Gao-bin (School of Science,Hefei University of Technology,Hefei 230009,China);Novel Electrostatic Microrelay with Parallel-Comb Drive[J];Micronanoelectronic Technology;2007-Z1
9 Zhang Yufeng 1 and Li Desheng 2(1 Department of Automation Measurement and Control Engineering,Harbin Institute of Technology,Harbin 150001,China) (2 College of Mechanical Engineering & Applied Electronics Technology,Beijing University of Technology,Beijing 100022,China);Fabrication and Simulation of an Electromagnetic Microrelay[J];Chinese Journal of Semiconductors;2002-12
10 YANG Zhenchuan LI Ting HAO Yilong WU Guoying (Institute of Microelectronics,Peking University,Beijing,100871);A Bulk Micromachined Relay with Lateral Contact and Isolation Structure[J];Acta Scicentiarum Naturalum Universitis Pekinesis;2004-03
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 ZHU Bingjie1,TAO Yi1,2,WU Yulie1,CHEN Zhihua1 1.College of Mechanical Engineering &Automation,National University of Defense technology,Changsha 410073,China; 2.Wuhan Ordnance N.C.O.Academy,Wuhan 430075,China;Research on Adhensive Layer and Its Effects on Vibtation Characteristics of Resonator and PZT of Cupped Gyro[J];Chinese Journal of Sensors and Actuators;2011-09
2 YAO Fenglin1,2,GAO Shiqiao1 1.School of Mechanical and Electronic Engineering,Beijing Institute of Technology,Beijing 100081,China; 2.School of Mechanical and Electronic Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China;The Calculation Method of the Electrostatic Drive Force of Micro Machined Groscope Comb[J];Chinese Journal of Sensors and Actuators;2011-09
3 LU Jing,XIANG Yu,MA Xiao-qiang(Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China);Novel method for analyzing large deflection deformation of micro-cantilevers[J];Transducer and Microsystem Technologies;2008-07
4 LU Jing,XIANG Yu,YUAN Li-yun,MA Xiao-qiang(Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China);Analysis of dynamic characteristics of torsion micromirrors with edge effects[J];Transducer and Microsystem Technologies;2008-09
5 WANG Li-ming 1,2,HU Qing-chun1(1.School of Mechanical and Automotive Eng.,South China University of Technology,Guangzhou 510641,China; 2.Shenzhen Inst.of Adv.Tech.Chinese Academy of Science,Shenzhen 518055,China);Principle modeling and key factors analysis of the electrostatic adhesion mechanism used in wall climbing robot[J];Advanced Technology of Electrical Engineering and Energy;2012-01
6 LU Jing,XIANG Yu,YUAN Li-yun,MA Xiao-qiang (Department of Automobile Engineering of Guangxi University of Technology,Liuzhou 545006,China);ANALYSIS OF ELECTROSTATIC MECHANICAL CHARACTERISTICS OF MICRO-MIRROR WITH EDGE EFFECTS[J];Engineering Mechanics;2008-07
7 *LU Jing , XIANG Yu , WEI Xiao-mei , HUANG Yin-yan (Department of Automotive Engineering of Guangxi University of Technology, Liuzhou 545006, China);A HIGH PRECISION COMPUTATIONAL MODEL AND METHOD FOR ANALYZING THE LARGE DEFLECTION OF MICROBEAMS DRIVEN BY ELECTROSTATIC FORCE[J];Engineering Mechanics;2009-06
8 Guo Zhanshe,Cao Le,Zhao Xin,Fan Shangchun (1.School of Instrument Science and Opto-electronics Engineering,Beijing University of Aeronautics and Astronautics,Beijing 100191,China; 2.Ley Laboratory for Precision Opto-mechanics Technology,Ministry of Education,Beijing 100191,China);A new high precision simulation method for MEMS comb actuator and the experiment[J];Journal of Graphics;2012-03
9 YUAN Li-yun1,LIANG Zhi-da1,2,LU Jing1,WEI Xiao-mei1(1.Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China;2.School of Civil Engineering & Architecture,Guangxi University,Nanning 530004,China);The influence of edge effects on the static characteristics of a micromirror[J];Journal of Guangxi University of Technology;2007-04
10 LU Jing,WEI Xiao-mei,MA Xiao-qiang(Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China);A high precision method for analyzing the deformation of micro-cantilevers driven by electrostatic force[J];Journal of Guangxi University of Technology;2008-01
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved