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Design a multi finger silicon micromechanical accelerometer

YUAN Guang, DING Henggao, GAO Zhongyu DONG Jingxin Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China  
In order to fulfill the need for a moderate accurate accelerometer, a multi finger parallel accelerometer based on silicon on insulator (SOI) process has been designed. Its sensitive direction is parallel to the proof mass. A mechanical model and mathematical solution are presented, which have been developed in order to calculate the sensitivity and frequency behavior. The finite element analysis (FEA) method is also be used. This paper emphases on the discussion of the changes of the sensitivity, frequency, the acceleration measurements range, caused by the changes of the main dimensions such as the thick of the proof mass, the width of the beam of the acceleration sensor. In the end, two designs are described. The size of the sensor is about 1.5mm×1.5mm, the proof masses are 10μm and 15μm thick and the sensitivities relative to gravitational acceleration are 5×10 -3 and 3×10 -3 , respectively
【Fund】: 国防科工委重点预研项目
【CateGory Index】: V241.45,U666.122
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