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《Journal of Synthetic Crystals》 2009-S1
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Study on the Tribological Properties of TiN Thin Films with Different Thicknesses

CHEN Xin-chun,YANG Yi-yong,WU Su-dong,WANG Cheng-biao,FU Zhi-qiang,PENG Zhi-jian(School of Engineering and Technology,China University of Geosciences(Beijing),Beijing 10083,China)  
A series of TiN films with different thickness were prepared by a mid-frequency magnetron sputtering(MFMS) system.The nanohardness,adhesion strength to substrate,friction coefficients and tribological properties of the TiN thin films were studied.The morphology results showed that the obtained TiN films have smooth surfaces and few defects exsisted,but as the thickness of the film increasing,the films may tear off from the substrate due to excessive inner stress.Although their thicknesses increase with increasing deposition times the nanohardnesses of the films kept constant(about 21 GPa).The critical loads measured by scratch test increased as the thickness of the film increasing,but when the thickness is too high,the critical load will drop down due to its high inner stress,which means that the adhesions of the films to substrates can be enhanced with appropriate increase in film thickness.The friction coefficients measured in tribological experiment were different when the applied loads were different;in this study,with loads of 20 g,50 g and 100 g,the measured friction coefficients,which may match those of TiN films,a special transition layer between films and substrates,and the stainless steel substrate,are 0.05,0.41,and 0.69,respectively.The combined tribological properties of the coated materials could be improved with a proper thickness of films.
【Fund】: 科技部重大国际合作项目资助(2006DFB51260)
【CateGory Index】: TB383.2
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【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 Liu Jia,Guo Chunli(Hebei Polytechnic University,Hebei,Tangshan,063000);Preparation of Metal-ceramic Composite Coating and Research Prospects[J];Ceramics;2010-05
2 Chen Fei1,2,Chen Liangxian1,Guo Shibin1,Li Chengming1,Lv Fanxiu1 (1.School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China;2.Department of Materials Science and Engineering,Beijing Institute of Petrochemical Technology,Beijing 102617,China);Analysis on the Fracture Strength and Morphology of the Diamond Film[J];New Technology & New Process;2010-05
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