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《Journal of Synthetic Crystals》 2013-10
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Effect of Substrate Temperature on the Structure and Photoelectric Properties of Al Doped ZnO Films

WU Ke-yue;WU Xing-ju;CHANG Lei;Department of Material and Chemical Engineering,West Anhui University;Anhui Provincial Engineering Research Center of Photovoltaic Materials Development and Application,West Anhui University;  
Al doped ZnO(AZO) thin films were deposited by DC magnetron sputtering.The effect of substrate temperature on the structure and photoelectrical properties was studied by scanning electron micro-scope(SEM),X-ray diffraction(XRD),ultraviolet-visible(UV-Vis) spectrophotometer and four point probe method.The results showed that the morphology,structure,optical and electrical properties can be controlled by the substrate temperature.As the substrate temperature increasing,the growth mode of AZO transforms from irregularity particles to spherical particles and the size decreases as the substrate temperature increasing.The crystalline orientation changes from(002) and(101) to(002),and the intensity of(002) peak increases as the substrate temperature increasing which indicated that the crystalline quality become better.The near band gap absorption peak(380 nm) and defect absorption peak(500 nm) were observed in the samples growth with lower substrate temperature.However,with increasing the substrate temperature the defect absorption peak disappeared.The resistivity of the films decreases from 9 × 10- 2Ω·cm to 5 × 10- 3Ω·cm;its carrier concentration increases from 6 × 1019cm- 3 to 2.2 × 1020cm- 3as substrate temperature increased from 100 ℃ to 300 ℃.
【Fund】: 安徽省教育厅自然科学重点项目(KJ2013A261);; 六安市定向委托皖西学院自然科学基金(2013LWA012)
【CateGory Index】: O484.1
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