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《Journal of Synthetic Crystals》 2013-12
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Study on Morphologies and Photoluminescent Properties of Al-H Co-doped ZnO Thin Films

CHEN Yi-chuan;HU Yue-hui;ZHANG Xiao-hua;MA De-fu;LIU Xi-mei;XU Bin;ZHANG Zhi-ming;School of Mechanical and Electronic Engineering,Jingdezhen Ceramic Institute;  
Al-H co-doped ZnO thin films were deposited on the quartz glass at different substrate temperatures by RF megnetron sputtering.The crystal structure,surface morphology,electrical,optical and photoluminescence(PL) performance of ZnO∶ Al-H thin films were analyzed.The results of XRD and SEM show that the crystallinity of ZnO films increases,the size of ZnO particle increases and the density of thin films increases as the substrate temperature increasing,the surface undulation changing of films decreases.The lowest resistivity reached 7.58 × 10- 4Ω·cm and the transmittance keeps about 75%.According to the PL spectra,the intrinsic luminescence of all samples were dominated,Al-H co-doped can decrease the ZnO films defects and the luminescence intensity of defects.As the substrate temperature increasing,the intrinsic luminescence intensity of ZnO films increased; Meanwhile, the ultraviolet photoluminescence peak was observed at 3.45 eV with all ZnO∶ Al-H thin films samples.
【Fund】: 国家自然科学基金(61066003);; 江西省科技支撑计划项目(2010BGA01100);; 江西省对外合作资助项目(20111BDH80031 20132BDH80025);; 江西省自然科学基金(20111BAB202005 20132BAB202001);; 江西省主要学科学术和技术带头人培养计划项目(20123BCB22002);; 江西省高等学校科技落地计划(KJLD12085);; 江西省教育厅科技资助项目(GJJ12494 GJJ13643 GJJ13625)
【CateGory Index】: O484.41
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