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《Journal of Synthetic Crystals》 2015-11
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Effect of Grit Size on the Sub-surface Damage of Work-piece Lapped by FAP

DAI Zi-hua;ZHU Yong-wei;WANG Jia-shun;XIAO Ren-jie;ZHU Lin;LI Jun;College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics;  
A model describing the indentation depth of abrasive grain into work-piece was developed,based on the FAP parameters and lapping ones. A method named BOE step-by-step etching was adopted to measure the sub-surface damage layer depth of K9 glass and fused silica glass lapped by FAP which is embedded with different size of abrasives. The relationship between the subsurface damage layer depth and the abrasive grain size was established. Results show that the sub-surface damage layer depth is a function of work-piece characteristics,pad properties and abrasive size. The developed model based on the average indentation depth agrees with the experimental facts. The above work can be used to guide the design of FAP and processing parameters.
【Fund】: 国家自然科学基金(51175260 50905086);; 航空科学基金(2014ZF52055)
【CateGory Index】: TG580.6
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