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Properties, Application and Magnetron Sputtering Depositing Techniques of ITO Thin Film

WU Xiaofei,XI Yulin(Luoyang Ship Material Research Institute,Luoyang 471023,China)  
The properties,application and magnetron sputtering depositing techniques of ITO thin films were analyzed.The development of ITO thin film was also discussed.
【CateGory Index】: TN304.055
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