Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of Experimental Mechanics》 2004-04
Add to Favorite Get Latest Update

Factors Influencing Nanoindentation Test Data

ZHANG Tai-hua (State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics,Chinese Academy of Sciences, Beijing, 100080)  
Nanoindentation, depth-sensing indentation, involves applying a specific force-time history on a rigid indenter while continuous monitoring the displacements of the indenter into the surface. The technique is widely applied to measurements on micro/nano scale mechanical properties. The data of different depths into the surface were conducted on fused silica obtained with the MTS Nano Indneter~(○R) XP. The results indicate that the hardness and modulus values gradually increase with decreasing the depths. This paper focused on the factors influencing nanoindentation test data, such as detecting the point of surface contact, the shape and radius of the tip, natural hygroscopy and surface roughness of fused silica, and penetrating ranges of transition from elasticity to plasticity etc. It is shown that the effects of the above factors on the test data are obvious for the nano scale, and not for the micro/sub-micro scale. Therefore the reliability of test data for the nano scale should be noted.
【Fund】: 国家自然科学基金项目No .1 0 372 1 0 3和 1 0 1 72 0 86 ;; 中科院知识创新项目KJCX2 -SW -L2的资助
【CateGory Index】: O346.1
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 8 Hits
1 Wu Zijing1a,Wu Xiaojing1a,1b,Lu Qian1a,Shen Weidian2,Jiang Bin3(1.a.Department of Materials Science;b.Micro-Nanoelectronics Platform,Fudan University,Shanghai,200433,China;2.Department of Physics and Astronomy,Eastern Michigan University,Ypsilanti MI 48197,USA;3.Shanghai Integrated Circuit R&D Center,Shanghai 201203,China);Research of Delamination Phenomenon Under Nanoindentation on Cu/Ta/SiO_2/Si Thin Film[J];Semiconductor Technology;2008-09
2 JIANG Hong-kui,HU Li-guang,ZHU Chun-geng,ZHONG Jun-jian (Zhejiang Normal University,Jinhua 321004,China);Testing Technology of Mechanical Properties of Micro/nanoscale Component[J];Surface Technology;2006-04
3 LIU Mei-hua1,2,LI Hong-qi1,WANG Jing3,WANG Jiang-hong2,TONG Jing-wei1(1.Tianjin University,Tianjin 300072,China;2.Tianjin University of Commerce,Tianjin 300134,China;3.Military Traffic Institute,Tianjin 300161,China);Influencing Factors of Nano-indentation Test Precision[J];Materials for Mechanical Engineering;2008-08
4 JIANG Hongkui~(1,2),FAN Zhen~2,DING Jianning~2,HU Liguang~1,YAO Tangwei~1(1.Zhejiang Normal University,Jinhua Zhejiang 321004,China;2.Center of Micro/Nano Science & Technology,Jiangsu University,Zhenjiang Jiangsu 212013,China);Measuring Principles of Micro/Nano-hardness Techniques and its Development[J];Machine Tool & Hydraulics;2006-10
5 WU Zhenqiang XIA Yuan LI Guang XU Fangtao Institute of Mechanics,Chinese Academy of Sciences,Beijing 100080;MICRO-MECHANICAL PROPERTIES OF CERAMIC COATING FABRICATED BY PLASMA ELECTROLYTIC OXIDATION ON HOT-DIP ALUMINIZED STEEL[J];Acta Metallurgica Sinica;2008-01
6 DU Jun,ZHANG Ping,ZHAO Jun-jun,CAI Zhi-hai,JIA Da-lei(Academy of Armored Force Engineering,National Key Laboratory for Remanufacturing,Beijing 100072,China);COMPARISON OF MICRO-HARDNESS WITH NANO-INDENTATION HARDNESS IN HARDNESS MEASURING FOR MICRON LEVEL HARD COATING[J];Physical Testing and Chemical Analysis(Part A:Physical Testing);2008-04
7 JIANG Rui1,HU Xiao-fang1,XU Xiao-hui2,WU Xiao-ping1(1.CAS Key Laboratory of Mechanical Behavior and Design of Material,University of Science and Technology of China,Hefei 230027,Anhui,China;2.Department of Precision machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,Anhui,China);Study of Mechanical Properties of PZT Piezoelectric Film by Nano-indentation Technique[J];Journal of Experimental Mechanics;2007-06
8 WU Zijing1,WU Xiaojing1,SHEN Wei-dian2,JIANG Bin3 (1.Department of Materials Science,Fudan University,Shanghai 200433,China;2.Department of Physics and Astronomy,Eastern Michigan University,Ypsilanti,MI 48197,USA;3.Shanghai Integrated Circuit R&D Center,Shanghai 201203,China);Nanomechanical Properties of Passivation Thin Films in Integrated Circuit[J];Journal of Xi'an Jiaotong University;2008-11
Chinese Journal Full-text Database 2 Hits
1 Zhang Taihua Yang YeminState Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China;DEVELOPMENTS AND APPLICATIONS OF NANO-HARDNESS TECHNIQUES*[J];Advances In Mechanics;2002-03
2 Zhang Taihua, Yang Yemin (State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics,Chinese Academy of Sciences, Beijing 100080,P.R.China);Nano-hardness Tester and Its Application in MEMS[J];Modern Scientific Instruments;2002-01
Chinese Journal Full-text Database 10 Hits
1 Liu Meihua~1, Wang Jing~2, Wang Dongai~1 (1. School of Mechanical Engineering, Tianjin Commence University, Tianjin 300134, China; 2.Military Traffic Institute, Tianjin 300161, China);ANALYSIS OF TEST METHODS FOR INDENTATION HARDNESS[J];Engineering Plastics Application;2005-07
2 ;Nanoindentation applying to mechanical measurement for MEMS[J];Micronanoelectronic Technology;2003-Z1
3 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
4 YU Yan~1;FEI Ben-hua~2;ZHANG Bo~2;WANG Ge~1.1 International Center for Bamboo and Rattan,Beijing,100102,P.R.China;2 Beijing Institute of Forestry Machinery,Chinese Academy of Forestry,100091, P.R.China.;Longitudinal MOE and hardness of different cell wall layers of softwood tracheids.[J];Journal of Beijing Forestry University;2006-05
5 DONG Shi-yun1, XU Bin-shi2, Beake B D3, Zhu Sheng2, HU Zhen-feng2, WANG Hong-mei1 ( 1. National key laboratory for remanufacturing,Beijing 100072; 2.Department of materials science & engineering, Academy of armored force engineering, Beijng 100072; 3. Micro materials ltd, Wrexham, LL13 7YP, UK );The Measurement of Youngs Modulus of the Electro-brush Plated Nano-Composite Coatings by Nano-indenter[J];China Surface Engineering;2003-04
6 ZHANG Tai-hua1,LIU Dong-xu1,HUAN Yong1,WANG Xiu-lan2 (1.State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080;2. Beijing Research Institute of Aerospace Materials & Technology, Beijing, 100076);Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films[J];China Surface Engineering;2003-04
7 LIU Mei-hua 1 , WANG Dong-ai 1 , WANG Jiang2 (1.Tianjin Commerce University, Tianjin 300134, China; 2. Academy of Military Transportation, Tianjin 300161, China);Application of Micro-indentation Techniques in the Fiber Properties Study[J];Packaging Engineering;2005-04
8 HUANG Li-jun,HUANG Xu,CAO Chun-xiao(Beijing Institute of Aeronautical Materials,Beijing 100095,China);Nanoindentation Characteristics of Ti-12Mo-6Zr-2Fe Titanium Alloy[J];Journal of Materials Engineering;2007-03
9 ZHANG Xing-wen, SUN Ke-jun, HU Li-jiang, SUN De-zhi (Dept. of Applied Chemistry,Harbin Institute of Technology, Harbin 150001, China. Dept. of Environment Engineering, Harbin Institute of Technology, Harbin 150001 , China);Tribological behavior of epoxy-silsesquioxanes hybrid coating on glass substrates[J];Material Science and Technology;2005-02
10 ZHOU Liang,YAO Ying-xue(College of Mechanical and Electrical Engineering,Harbin Institute of Technology,Harbin 150001,China);The Compare between Two Micro-Nanohardness Testing Methods[J];Journal of Test and Measurement Technology;2006-01
China Proceedings of conference Full-text Database 2 Hits
1 DING Jian-ning, XIE Guo-xin (Micro/Nano Science & Technology Center, Jiangsu University, Zhenjiang 212013, China);STUDY OF NANOINDENTION AND FRICTIONAL PROPERTIES ON PHASE CHANGE STORAGE MEDIA[A];[C];2006
2 Wu Yu-feng~1, Ma Sheng-ge~2, Zhou Yi~1, Zhang De-yuan~2, Zhang Yi-chen~1, Geng Man~2 (1. Northeastern University, Shenyang 110004,China; 2. National R&D center for surface engineering of China, Shenzhen,518029,China);Influence of technical parameter on TiN prepared by middle frequency unbalanced magnetron Sputtering[A];[C];2005
Chinese Journal Full-text Database 10 Hits
1 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
2 HUANG Wei~1,ZHAO Bao-rong~1,SHI Hong-gang~1,SHANG Fu-jun~1,LI Ya-feng~2(1.The Ningbo Branch of Ordnance Science Institute of China,Ningbo 315103,Zheijiang,China;2.Inner Mongolia University of Technology,Huhehaote 010062,Inner Mongolia,China);The Strain Hardening Law of Micro-structure of WHA Tested by a Nanoindentation Method[J];Acta Armamentarii;2006-02
3 ZHU Xiao-dong,MI Yan-yu,HU Nai-sai,HE Jia-wen;Investigation into Evaluation of Interfacial Strength of Coatings[J];China Surface Engineering;2002-04
4 YU Ying~ 1* ,WU Qing-xin~1,LUO Zhong-zi~2 1.Depantment of Electronic Seience and Applied Physics,Fuzhou University,Fuzhou 350002,China; 2.SA Peng-tung Microelectromechanical Systems Research Center,Xiamen University,Xiamen 360005,China;Study on Mechanical Property of Silicon Nitride Thin Film and the Application in RF MEMS Switches[J];Chinese Journal of Sensors and Actuators;2006-05
5 YANGBing, YANG Yin-tang, LI Yue-jin (Inst of Microelectronics, Xidian University, Xi'an 710071, China);Applications of PZT pieoelectric thin films in microsensors[J];Journal of Transducer Technology;2003-12
6 ;Current Status of Research on Internal Stress in Diamond Films[J];Materials Review;1999-06
7 Qin Fang (Institute of Aeronantical Materials,Beijing);The Effect of Several Factors on the Microhardness Test Value[J];Journal of Materials Engineering;1997-06
8 ZHAO Bing, XU Bao-xing, YUE Zhu-feng (Department of Engineering Machanics, Northwestern Polytechnical University, Xi'an 710072, China);Determination of the Elastic-plastic Properties of Thin-film Substrate System by the Indentation testing with the flat indenter[J];Journal of Materials Science and Engineering;2005-01
9 Ren Fengzhang, Ju Xinhua, Zhou Genshu, Hu Zhizhong, Zhao Wenzhen,Zheng Maosheng (School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049,China);Current Status and Prospects of Bulge Experiments for Thin Film Behavior Testing[J];Rare Metal Materials and Engineering;2001-05
10 Zhao Zexiang1,2, Jiang Zhuangde1, Wang Hairong1(1 Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, China)(2 Zhongyuan Institute of Technology, Zhengzhou 450007, China);Classification and Evaluation of Influence Factors for Measuring Uncertainty of Property of Micromechanics of Materials by Nanoindentation[J];Rare Metal Materials and Engineering;2002-05
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 Yuan Hongmei(Zhuzhou Cemented Carbide Group CO.LTD Zhuzhou Hunan,412000);Effect of Experimental Parameters on Internal Stress in Diamond Films[J];Cemented Carbide;2008-04
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved