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《Microprocessors》 2004-03
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The Applied Technique Study of Scanning Electric Microscope During Semi-conductor Process

WANG Song-yu,XU Ning,YUAN Kai,et al(Northeast Microelectronics Institute,Shenyang 110032,China)  
Aim at the demand of the semi conductor technics,this text provided the principle make use of the electronic microscope to proceed the analysis and key technique of using.
【CateGory Index】: TN305
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