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《Journal of Wuhan University of Technology》 2009-08
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Principle & Performance Analysis for Comb-finger Capacitive Acceleration Sensor

Hu Xue-mei,Qu Bao-zhong (Department of Electronic Engineering,Henan Polytechnic Institute,Nanyang,473009,China)  
This paper takes the closed-loop bias stationary comb-finger variablecapacitance sensor as an example,introduces its operation principle,establishes its mechanics model.Through the analysis,the essential physical expression formula such as electrostatic forces,Input range,stability,resolution are obtained.The results prove that performance of the sensor are connected with the dimension of the beam,the mass,the area of the pole plate,bias voltage,feedback voltage and so on.This work will provide a reliable theoretic foundation for the further optimum design of variable-capacitance acceleration sensor.
【CateGory Index】: TP212
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