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《MICROFABRICATION TECHNOLOGY》 1995-01
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MICROWAVE ECR PLASMA TECHNOLOGY AND IT'S APPLICATON IN CATERIALPROCESSING

Ning zhaoyuan; Cheng Shanhua(Suzhou University,Suzhou 215000)  
Principles of microwave ECR plasma technology are introduced briefly.Present development of it’S research and applications in system manufacturing,CVD,PVD and etching is reviewed.
【CateGory Index】: TN305.7
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【References】
Chinese Journal Full-text Database 2 Hits
1 SANG Li-jun,CHEN Qiang(Beijing Key Laboratory of Plasma Physical and Material,Beijing Institute of Graphic Communication,Beijing 102600,China);Study of Diamond-like Carbon Films Prepared by ECR-RF Dual-Power Source Plasma Chemical Vapor Deposition[J];Packaging Engineering;2008-10
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 Zhen Hansheng(Department of Electron Engineering, Tsinghua University, Beijing);THE TECHNOLOGY AND APPLICATIONS OF MICROWAVE ECR PLASMA[J];Vacuum Science and Technology;1993-02
【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 Ye Chao(physics,Science & Techn.College Suzhou University,215006);INVESTIGATION OF MATERIALS PROCESSED WITH THE MICROWAVE ECR PLASMA[J];JOURNAL OF SUZHOU INSTITUTE OF SILK TEXTILE TECHNOLOGY;1998-03
2 Ye Chao;Ning Zhaoyuan(Thin Film Materials Laboratory,Institute of Physics Science and Technology,Suzhou University, Suzhou, 215006);The Investigation of Plasma Characteristics in Non-symmetric Axial Two-pole Field[J];;1997-02
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1 ZHOU Hong a , LAI Jian-jun a,b , ZHAO Yue a , KE Cai-jun a,b , ZHANG Kun 2 , YI Xin-jian a,b (1.a.Department of Optoelectronic Engineering;b.The State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074, China; 2.The 44th Electronic Research Institute, Chongqing 400060,China);Study on Reactive Ion Etching of Silicon in SF_6/O_2/CHF_3 Mixtures[J];Semiconductor Technology;2005-06
2 YU Guo-bin,YAO Han-min,HU Song,CHEN Xing-jun (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu610209,China);Application of DUV deep lithography in LIGA process[J];Semiconductor Information;2002-04
3 LI Yan ning,TANG Jie,RAO Zhi jun,SONG Xiao hui, HU Xiao dong,FU Xing,HU Xiao tang (State Key Lab of Precision Measuring Technology & Instrument Tianjin,University,Tianjin 300072,China);Applications of pulsed laser microfabrication technology in MEMS[J];Micronanoelectronic Technology;2003-Z1
4 ZHOU Zhongcheng FENG Jian ZHANG Changrui GAO Qingfu WANG Juan CFC State Key Laboratory of National University Defense and Technology,Changsha 410073;CHENG Huimei Mechatronics and Automation School of National University of Defense Technology,Changsha 410073;Progress in Study on the Removal of Templates during the Syntheses of Ordered Mesoporous Materials[J];Materials Review;2005-08
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1 ZHENG Yu, CHEN Huan Lin *, LI Jing, CHAI Hong, LIU Mo E [WT5”BX](College of Chemical Engineering, Zhejiang University, Hangzhou 310027, China) [WT5HZ];Studies on the Affinity Membrane for Adsorption and Purification of Lysozyme(Ⅰ) Influence of Low temperature Oxygen Plasma Treatment on Surface Structure and Adsorption Properties of the Affinity Membrane[J];CHEMICAL RESEARCH IN CHINESE UNIVERSITIES;1999-08
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3 Wang Yingte1 Guo Mingyuan2 (1.Shanxi University,Taiyuan 030006;2. Northwest Institude of Textile Technology);Study on the Surface Modification of Plasma of Polyacrylonitrile Super-Filter Membrane[J];Shanxi Chemical Industry;2000-04
4 XIONG Yan-li~1,WANG Rui-min~1,WANG Yun-fang~2,ZHENG Gang~1,LU Min-fei~1 (1.Department of Applied Chemistry, College of Science, Northwestern Polytechnical University,Xi’an,Shanxi 710072,China; 2.Chemical Department,Xianyang Teachers’ College,Xianyang,Shanxi 712000,China);Application Progresses of Surface Modification on Polymer by Plasma Technology[J];Plastics;2005-03
5 LI Sheng-gang1,ZHANG Dan2,TIAN Xiu-bo1,HUANG Yong-xian1,YANG Shi-qin1(1.State Key Laboratory of Advanced Welding Production Technology,School of Materials Science & Engineering,Harbin University of Technology,Harbin 150001;2.Department of Health Information Management,Shanghai Technical college of SiBo,School of Health and Nursing,Shanghai 203100);Effect of RF-induced atomic oxygen exposure on surface properties of PET films[J];Vacuum;2008-06
China Proceedings of conference Full-text Database 1 Hits
1 Xianwen Ke, Yueqin Wang, Xuliang Zhang School of Printing and Packaging,Wuhan University,Wuhan, Hubei,China430072 School of Humanity and Communication,Shanghai Normal University,Shanghai,China200234 School of Media and Communication,Shengzhen Polytechnic,Shengzhen,Guangdong,China518055;Study on the Improvement of Low-Temperature Plasma to the Printability of Plastic Films[A];[C];2006
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