Full-Text Search:
Home|About CNKI|User Service|中文
Add to Favorite Get Latest Update

MICROWAVE ECR PLASMA TECHNOLOGY AND IT'S APPLICATON IN CATERIALPROCESSING

Ning zhaoyuan; Cheng Shanhua(Suzhou University,Suzhou 215000)  
Principles of microwave ECR plasma technology are introduced briefly.Present development of it’S research and applications in system manufacturing,CVD,PVD and etching is reviewed.
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
©CNKI All Rights Reserved