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《Journal of Northwest Normal University(Natural Science)》 2010-01
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Study of structure and optical properties of Cu-doped ZnO nanofilms prepared by RF magnetron sputtering

MA Shu-yi1,MAO Lei-ming1,MA hui2,SHI Xin-fu1,ZHOU Ting-ting1,DING Ji-jun1(1.College of Physics and Electronic Engineering,Northwest Normal University,Lanzhou 730070,Gansu,China;2.Department of Physics and Electronic Technology,Chaohu University,Chaohu 238000,Anhui,China)  
ZnO films doped with different Cu concentration are prepared on glass substrate by RF magnetron sputtering system.The structural and morphology of the samples are investigated by X-ray diffraction(XRD),atomic force microscopy(AFM)and scanning electron microscopy(SEM),and the stress in the ZnO thin films is analyzed.The results show that all the samples have a strong diffraction peak and high preferential orientation in the(002)crystallographic direction.Three peaks have been observed from the PL spectra of the all samples,395 nm(3.14 eV,violet),446 nm(2.78 eV,blue)and 488 nm(2.54 eV,blue).It is concluded that the violet peak may correspond to the exciton emission,the blue emission corresponds to the electron transition from the bottom of the conduction band to the acceptor level of zinc vacancy;the optical test shows that the optical band gap Eg are decreased within the increase of Cu doped in ZnO,the band gap decrease from 3.26 eV to 2.99 eV gradually.It is also found that the transmission rate is decreased rapidly when the Cu concentration is increase.
【Fund】: 国家自然科学基金资助项目(10874140);; 甘肃省自然科学基金资助项目(0710RJZA105);; 甘肃省高分子材料重点实验室开放基金资助项目(KF-05-03)
【CateGory Index】: O484.41
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