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《Modern Electronics Technique》 2007-06
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Focusing-servo System Based on LabView

LIU Yang,XIONG Mudi,GAO Song(Information and Engineering Institute of Optics,Dalian Maritime University,Dalian,116023,China)  
To improve the precision of the laser direct writing device,researches have been done for the focusing servo system.This paper describes a method of implementing focusing servo system with the tool of LabView and also introduces the focusing principle of critical angle in detail.Analyses the problems,such as the overflow of dead current,the interference of irradiance bodies around and the improper proportion between two sides.Finally expatiates the course that how to detect signals,analyse the data and drive the PZT by the figural program tool of LabView.The results have been showed an obvious effect and reach up to 0.2 μm during the test.
【CateGory Index】: TP273
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