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《Modern Electronics Technique》 2007-18
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A Novel Measure Scheme of z Silicon Micro-machined Vibratory Gyroscope

ZHANG Jie,ZHOU Bailing(Academy of Instrument Science and Engineering,Southeast University,Nanjing,210096,China)  
A silicon microgyroscope is widely applied in inertial measure field,because of its tiny bulk,low power consumption and high reliability.A novel measure scheme is proposed to improve the sensitivity and SNR of silicon micro-machined vibratory gyroscope.Dynamics equation of driving,sensitive modes of silicon micro-gyroscope is researched.Based on the equivalent analogue derived,the sensitive method for the silicon micro-gyroscope signals is discussed.The systems simulation of the configuration of gyroscope and the detection circuit has proved the feasibility of the scheme.
【CateGory Index】: V241.5
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【Co-citations】
Chinese Journal Full-text Database 4 Hits
1 JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long (Micro&Nano System Laboratory, Northwestern Polytechnical University,Xi`an 710072 ,China);An Interface Circuit for Capacitive Vibratory Microgyroscopes[J];Chinese Journal of Sensors and Actuators;2006-05
2 LI Qian,LI Xiao-ying,CHANG Hong-long,JIANG Qing-hua (Micro/Nano System Laboratory, Northwestern Polytechnic University, Xi'an 710072 ,China);Study on the Circuit of Driving Loop Control for Micromachined Vibratory Gyroscope[J];Chinese Journal of Sensors and Actuators;2006-05
3 WANG Yuzhao,YUAN Weizheng,REN Sen,QIAO Dayong(Micro and Nano Electromechanical System Laboratory,Northwestern Polytechnical University,Xi'an 710072,China);Closed-Loop Topologies for Electrostatic Drive Resonant Pressure Sensor[J];Chinese Journal of Sensors and Actuators;2011-07
4 XU Yi-shen,WANG Shou-rong,SHENG Ping,JI Xun-sheng (Department of Instrument Science & Engineering,Southeast University,Nanjing 210096,China);Analysis and Design on the Closed-Loop Driving Circuit of Micromachined Vibratory Gyroscope[J];Measurement & Control Technology;2006-10
【Secondary Citations】
Chinese Journal Full-text Database 2 Hits
1 Mao Pansong; Wu Shaofu; Wang Xiulun (Southeast Univercity);Reseach on Silicon Micromechanical Gyroscope[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1995-04
2 HUO Pengfei1, MA Binghe1, YUAN Weizheng1(MEMS/NEMS Lab., Northwestern Polytechnical University, Xi′an710072, China);Modeling and Simulation of Micromachined Accelerometer Using Multi-Port-Element Network Method[J];Acta Aeronautica Et Astronautica Sinica;2003-05
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