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《Rare Metals Letters》 2008-03
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Development of ITO Transparent and Conductive Thin Films

Cheng Lishun1,2,Sun Benshuang2,Zhong Jingming2,He Lijun1,Wang Dongxin2,Chen Huanming1 (1. Ningxia University,Yinchuan 750021,China) (2. Northwest Rare Metal Materials Research Institute,Shizuishan 753000,China)  
The type of transparent and conductive thin films is reviewed briefly. And the properties,applications, transparent and conductive principles and fabrication techniques of ITO films are also summarized in the paper. The advantages and disadvantages among several fabrication techniques are compared. Meanwhile,the theoretical developments including lattice distortion,limitation of carrier concentration,the optimum content of dopant,infrared emissivity and shift of optical absorption edge of ITO films are summed up. Finally,the research on the unconventional applications and the further development of ITO thin films is discussed.
【CateGory Index】: TB383.2
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