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《New Technology & New Process》 2006-05
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Research Tendency of Ultra Precision Measurement Key Technology

Ultra-precision measurement is the important part of ultra-precision machining. The study of ultra-precision measurement mainly involves optical-interferometer technology, electricity- measurement technology and scanning-probe technology. The operational principle of several measurement technologies and research status of equipment technology are described.
【CateGory Index】: TG806
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【References】
Chinese Journal Full-text Database 1 Hits
1 SHEN Xiao-yan,LIN Jie-jun,LI Jia-fu,YIN Jian-long,LI Dong-sheng (College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China);Evaluation and Error Analysis of Ultra-precision Two-dimensional Measuring and Positioning System[J];Instrument Technique and Sensor;2013-06
【Citations】
Chinese Journal Full-text Database 5 Hits
1 CHEN Ying-fei,ZHANG Hai-jun,ZHANG Dong-xian (State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou 310027,China);Nanometer scale roughness measurements with atomic force microscopes[J];Optical Instruments;2003-04
2 Zhao Ping, Yang Yong, Hu Xiaotang(State Key Laboratory of Pecision Measuring Technology and Instrument, Tianjin 300072)[;An Overview of Nanometrology for Geometry Parameters[J];Aviation Precision Manufacturing Technology;2001-06
3 Li Yongqian, Zhu Mingquan(Department of Vehicle Manufacturing, Northwestern Polytechnical University, Xi'an 710072);Optical Interferometry Technology and its Development in Nanometric Accuracy Measurement[J];Aviation Precision Manufacturing Technology;2002-02
4 ;The Ultraprecision Machining Technique towards the 21th Century[J];Mechatronics;2003-02
5 MA Rong-jun(Changsha Research Institute of Mining and Metallurgy, Changsha 410012,Hunan,China);Atomic Force Microscope and Its Application[J];Mining and Metallurgical Engineering;2005-04
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Wang Ji,Zhu Zhenyu,Li Huafeng (Changcheng Institute of Metrology and Measurement,AVIC,Beijing 100095,China);High Precision Heterodyne Interferometer for Nanometer Measuring Machine[J];Micronanoelectronic Technology;2011-07
2 JIANG Wen-jun,CHEN Zhen-yu,GUO Xing-peng(Department of Chemistry and Chemical Engineering,Huazhong University of Science and Technology,Wuhan 430074,China);Pitting Corrosion Behavior of N80 Steel[J];Materials Protection;2007-08
3 HAN Xian-wu 1,CHEN Xiao-an 1,YANG Xue-heng 2,BAI Hai-hui 2(1.State Key Laboratory of Mechanical Transmission;2.College of Mathematics and Physics,Chongqing University,Chongqing 400030,China);Nanometer Scale Surface Roughness Measurement Based on AFM[J];Journal of Chongqing University(Natural Science Edition);2007-02
4 ;Current Status and Developing Trend of Super Accuracy Manufacturing[J];Construction Machinery and Equipment;2006-06
5 Liu Xiaowei,Huang Qiangxian Postgraduate,Mechanics and Instrument College,Hefei University of Technology,Hefei 230009,China;Homodyne Laser Interferometric Measurements of Displacement Based on VC++6.0[J];Tool Engineering;2010-02
6 PEI Ya-peng YANG Jun YUAN Li-bo ( Institute of Fiber Optic Sensors School of Science of Harbin Engineering University, Harbin 150001, China );Principle of Fiber Optic Interferometric Sensors and Their Phase Demodulation Techniques[J];Optics & Optoelectronic Technology;2005-03
7 LI Zhi, WANG Xiang-jun (National Laboratory of Precision Measurement Technology and Instruments,College of Precision Instrument and Opto-electronic Engineering, Tianjin University, Tianjin 300072, China);MEMS measurement technologies and methods[J];Optics and Precision Engineering;2003-01
8 OUYANG Miao-an(Foshan Polytechnic College,Foshan 528000,China);Study of ultra-precision vertical grinding for aspheric lens mould[J];Optics and Precision Engineering;2006-04
9 LI Xin-hong, ZHANG Hai-jun ang University,Hangzhou 310027,China);Micro positioning stage with a hinge mechanism driven by piezo element[J];Optical Instruments;2004-03
10 HE Yu-lin,ZHANG Hai-jun,LIN Xiao-feng University,Hangzhou 310027,China);Micro step motion mechanism driven by piezo element[J];Optical Instruments;2004-04
China Proceedings of conference Full-text Database 1 Hits
1 Liao Xiaohua Ge Yangxiang Li Yuhe Li Qingxiang (Dept. of Precision Instrum., Tsinghua Univ., Beijing 100084, China);Scratch Test System at Nano-scale for Superfinish Surface[A];[C];2005
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 TAN Qian-li (Chongqing Optoelectronics Research Institute,Chongqing 400 060,CHN);The Application of Quadrant Photodetector Module on Laser Guidance Technology[J];Semiconductor Optoelectronics;2005-02
2 CHEN Xianzhong, HOU Qingwen, YE Lin, ZHANG HongyuInformation Engineering School, University of Science and Technology Beijing, Beijing 100083, China;High-accurate central ellipse algorithm for an ultrasonic ranging system[J];Journal of University of Science and Technology Beijing;2007-11
3 Hua Hong;Wang Yongtian;Xu Tong (Department of Optical Engineering , Beijing Institute of Technology, Beijing 100081);Dynamic Rangefinding Device Using Amplitude-Modulated Continuous UltrasonicWave+[J];北京理工大学学报(英文版);1998-01
4 Zhou Jianmin;Bai Suping (College of Opto-Electronic and Mechanical Engineering of Changchun Inst. Opt. and Fine Mech.);The Application of Laser Beam Datum in Error Autorctification of MachineTool Working Table[J];Journal of Changchun Institute of Optics and Fine Mechanics;2001-01
5 FU hua,DU Xiao-kun,CHEN Feng (Department of Electric Engineering Liaoning Technical University, Fuxin Liaoning 123000, China);Ultrasonic Sensor Compensation Algorithm and Its Application in Pit Robot Obstacle Avoidance System Based on Neural Network[J];Chinese Journal of Sensors and Actuators;2006-02
6 XU Zhongyang 1 ZHANG Liangju WEI Jinxiang (1 Zhengzhou Institute of Surveying and Mapping, 66 Middle Longhai Road, Zhengzhou 450052, China);THE COLUMANAR TANK CALIBRATION SYSTEM BASED ON LEICA TCR SERIES TOTAL STATION[J];Wtusm Bulletin of Science and Technology;2002-04
7 Luo Changlin1), Zhang Zhenglu1), Deng Yong1),Mei Wensheng1) and Chen Benrong2)1)School of Geodesy and Geomatics, Wuhan University, Wuhan 4300792)Department of Civil Engineering, Guilin University of Technology, Guilin 541004;ON NONLINEAR 3D RECTANGULAR COORDINATE TRANSFORMATION METHOD BASED ON IMPROVED GUSS-NEWTON METHOD[J];Journal of Geodesy and Geodynamics;2007-01
8 SHI Yang, ZHANG Hai-jun (State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China);Study on a novel atomic force microscope with large scanning range[J];Opto-electronic Engineering;2004-06
9 ZHU Wan-bin1,ZHONG Jun1,2,MO Ren-yun1,2,CHEN Xuan3(1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Graduate University of Chinese Academy of Sciences,Beijing 100039,China;3.Changchun University of Science and Technology,Changchun 130022,China);Design of Spectral Confocal Chromatic Displacement Sensor Objective[J];Opto-Electronic Engineering;2010-08
10 ZHU Wan-bin1,CAO Shi-hao2(1.State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Changchun University of Science and Technology,Changchun 130022,China);Application of Confocal Chromatic Displacement Sensors to Measuring Thickness of Transparent Material[J];OME Information;2011-09
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 SONG Zhong-kang,MA De-jun,CHEN Wei(Department of Mechanical Engineering,Academy of Armored Force Engineering,Beijing 100072,China);A Review of Nanoindentation Measuring Instruments for Materials Mechanical Properties[J];Journal of Academy of Armored Force Engineering;2010-04
【Secondary Citations】
Chinese Journal Full-text Database 4 Hits
1 WANG Yan xia 1,2 ,LI Yan ning 1,FU Xing 1,LI Zheng guang 3,HU Xiao tang 1 (1. The State Key Lab. of Precision Measuring & Technology and Instruments,Tianjin University,Tianjin300072,China; 2. Information Control & Engineering College,Qingdao University of Sci Tech,Qingdao266042,China; 3. Qingdao Heat & Power Company,Qingdao266034,China);Direct measurement of force in biology with AFM[J];Micronanoelectronic Technology;2003-Z1
2 Chao Zhixia(Tsinghua University, Beijing 100084) Xu Jie, Xu Yi(National Institute of Metrology,Beijing 100013);Fabry Perot Interferometer Used for Large Range Nanometer Measurement[J];ACTA METROLOGICA SINICA;1999-04
3 Zhao Kegong, Gao Sitian, Xu Yi(Physikalisch-Technische Bundesanstalt,Berlin)(National Institute of Metrology, Beijing 100013));A Metrological Atomic Force MicroscopeM. Bienias, K. Hasche, R. Seemann, K. Thiele[J];ACTA METROLOGICA SINICA;1998-01
4 QU Qiu_Lian, ZHANG Ying_Ge (Institute of Pharmacology and Toxicology, Academy of Military Medical Sciences, Beijing 100850,China);Measurement of intermolecular and intramolecular forces of proteins by atomic force microscopy[J];Bulletin of The Academy of Military Medical Sciences;2003-01
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