Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of System Simulation》 2009-21
Add to Favorite Get Latest Update

Studies on Modeling and Simulation of PECVD Process

ZHU Wen-hua,WANG Hai-dong,SU Yu-peng,HU Gui-hua (CIMS and Robot Center,Shanghai University,Shanghai 200072,China)  
Virtual simulation for the technique process based on virtual reality technology is an essential realization of the practical process. A hierarchical modeling approach to the technique process of Plasma Enhanced Chemical Vapor Deposition (PECVD) was proposed. The simulation environment was set up and the key technique of process simulation was illustrated. The PECVD process simulation was carried out with the C++ program based on Virtual-code. This concludes that the V-code is feasible and efficient. The application of virtual simulation can preview the technique process of the designing PECVD equipment and accelerate the design and manufacturing.
【Fund】: 国家自然科学基金资助项目(60706014);; 上海市制造业信息化专项基金资助项目(08DZ1124300);; 上海市重点学科建设资助(Y0102)
【CateGory Index】: TP391.9
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【Citations】
Chinese Journal Full-text Database 4 Hits
1 ZHANG Gu-wan, LONG Fei (Chongqing Optoelectronics Research Institute, Chongqing 400060, China);Research on Technology for Si_3N_4 Thin Film Grown by PECVD[J];Semiconductor Optoelectronics;2001-03
2 Wang Xiaoquan, Wang Lei, Xi Zhenqiang, Xu Jin, Cui Can, Yang Deren y, Hangzhou 310027, china);PROPERTIES OF PECVD SiN_X FILM FOR SOLAR CELLS[J];Acta Energiae Solaris Sinica;2004-03
3 ZOU Xiang-jun1,2, SUN Jian1, HE Han-wu1, ZHENG De-tao1,CHEN Xin1 (1.School of Electro-Mechanical Engineering, Guang Dong University of Technology, Guangzhou 510090, China; 2 .Nan Hua University,Hengyang Hunan 421001, China);The Development and Prospects of Virtual Reality[J];Acta Simulata Systematica Sinica;2004-09
4 ZHU Wen-hua, SU Yu-peng, HU Gui-hua, YU Tao (CIMS and Robot Center, Shanghai University, Shanghai 200072, China);Studies on Virtual Equipment Simulation Based on Virtual Code[J];Journal of System Simulation;2008-22
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 WAN Xiang-yun,HE Hua-gang,SU Zhi-dong(Engineer Faculty,China University of Geosciences,Wuhan 430074,China);Research of major hazard information system of chemical industry enterprise based on 3DGIS[J];Journal of Anhui University(Natural Sciences);2007-02
2 YANG Ji,FENG Shi-wei,WANG Cheng-dong,ZHANG Yue-zong,LI Ying,SUN Jing-ying (School of Electronic Information & Control Engineering, Beijing University of Technology, Beijing 100022, China);Investigation of Antireflection Coating for InGaAs/InP PIN Photodetectors[J];Semiconductor Technology;2006-08
3 YU Jun1,2,SU Xiao-si3,ZHU Lin3,DUAN Fu-zhou4,GAO Li3,WU Shu-liang2 1.Postdoctoral Program,Jilin University,Changchun 130026,China 2.Postdoctoral Fellowship,Geological Survey of Jiangsu Province,Nanjing 210018,China 3.College of Environment and Resources,Jilin University,Changchun 130026,China 4.Key Lab of 3D Information Acquisition and Application,MOE,Capital Normal University,Beijing 100037,China;Research on 3D Visualized Strata Model Virtual Reality System of Land Subsidence in Suzhou-Wuxi-Changzhou area[J];Journal of Jilin University(Earth Science Edition);2007-02
4 ZHU Lin1,2,SU Xiao-si1,2,DUAN Fu-zhou3,HU Zhuo-wei3,PAN Yun3,GAO Li1,2 1.College of Environment and Resources/Institute of Water Resources and Environment,Jilin University, Changchun 130026,China 2.Jilin University Branch,Joint Research Center of Urban Environment and Sustainable Development, Ministry of Education,Changchun 130026,China 3.Key Lab of 3D Information Acquisition and Application,MOE,Capital Normal University,Beijing 100037,China;Application of Virtual Reality Technology in Modeling Aquifer Structure and Groundwater Table Surface in Suzhou-Wuxi-Changzhou Area[J];Journal of Jilin University(Earth Science Edition);2007-02
5 LI Ling(Liaoning engineering technology university, Fuxin 123000);Discusses the distributional virtual reality and the timely research shallowly[J];Computer Programming Skills & Maintenance;2008-16
6 Du Yun et al;Event and Selection based on Open Inventor Technology[J];Computer Development & Applications;2008-03
7 YU Ye1,2,LIU Xiao-ping1,2(1.School of Computer and Information,Hefei University of Technology,Hefei Anhui 230009,China;2.Engineering Research Center of Safety Critical Industry Measure and Control Technology,Ministry of Education,Hefei Anhui 230009,China);The 3D Model Convention Tool for VR System[J];Journal of Engineering Graphics;2008-05
8 CHEN Yu-wu1,2,HAO Qiu-yan1,LIU Cai-chi1,WANG Li-jian1,SUN Hai-zhi1,ZHAO Jian-guo1 (1.Institute of information Function Materials,Hebei University of Technology,Tianjin 300130,China;2.Tianjin HuanOu Semi-conductor Material Technology Co.,Ltd,Tianjin 300384,China);Investigation of the properties of in-line PECVD silicon nitride after RTP[J];Journal of Optoelectronics.Laser;2008-10
9 WANG Kai-zhan, MA Rui-jun, HU Jian-feng (South China Agriculture University; Key Laboratory of Key Technology on Agricultural Machine and Equipment (South China Agricultural University), Ministry of Education, P. R. China., Guangzhou, 510642, China);Application and Development of Virtual Prototyping Technology Used in the Agricultural Machinery Design[J];Chinese Agricultural Mechanization;2008-04
10 Zhang Xiaoqing1,Li Peilin2,Wang Jingsong2,Yang Jianhong2(1.Tianguang Semiconductor Co.,Ltd.,Tianshui 741000,China;2.Institute of Microelectronics,Lanzhou University,Lanzhou 730000,China);Silicon Nitride Thin Film Deposited by PECVD as a Protecting Layer on Photolithography Mask[J];Semiconductor Technology;2009-11
China Proceedings of conference Full-text Database 3 Hits
1 ZHANG Rong-ming, ZOU Xiang-jun,GU Bang-jun (Guang Dong University of Technology, Guangzhou 510090, China; Agriculture University of South, Guangzhou 510642, China,;Nanhua University, Hengyang , 421001,China);Resource serving-oriented research of system of knowledge discovery[A];[C];2006
2 Ding Wanyu Xu Jun Gao Peng Lu Wenqi Deng Xinlv Dong Chuang (State Key Laboratory of Material Modification by Laser, Ion and Electron Beams Dalian University of Technology, Dalian 116024);Wear and Erode Characterizations of Ultra-thin Silicon Nitride Films[A];[C];2006
3 Li Weidong Wu Xuezhong Li Shengyi National University of Defence Techology,Changsha,410073;Study on Si_3N_4 Thin Films-Made by PECVD Technology[A];[C];2005
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Zhao Yongjun, Wang Minjuan, Yang Yongjun, Liang Chunguang(Hebei Semiconductor Research Institute, Shijiazhuang 050002)Received 19 November 1997, revised manuscript received 23 February 1998;Study on Stress of PECVD SiN_x Film[J];CHINESE JOURNAL OF SEMICONDUCTORS;1999-03
2 SU Qun-xing~1,LIU Peng-yuan~2 (1.Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;2.Ordnance Engineering College,Shijiazhuang 050003,Hebei,China);Study of the Virtual Maintenance Training System for Large Complex Equipment[J];Acta Armamentarii;2006-01
3 WEI Hai-yan, WANG Xian-kui, YU Ding-wen, ZHANG Yu-feng (Department of Precise Instrument and Mechanics, Tsinghua University, Beijing 100084, China);Research on Machine Tools Dynamic Design System for Virtual Product Development[J];Machine Tool & Hydraulics;2003-04
4 LEI Chao and DAI Guo Zhong (Institute of Software, Chinese Academy of Sciences, Beijing 100080);RESEARCH AND IMPLEMENTATION OF INTERACTIVE 3D ARCHITECTURE[J];Journal of Computer Research and Development;2001-05
5 Wang Hongbing (Department of Computer Science,Southeast University,Nanjing 210096);Virtual Reality Review and Expectation[J];Computer Engineering and Applications;2001-01
6 Dong Shihai (Department of Computer Science and Technology, Peking University, Beijing 100871);Progress and Challenge of Human-Computer Interaction[J];Journal of Computer Aided Design & Computer Graphics;2004-01
7 HUANG Bin, YAN Juan-qi, JIANG Zu-hua, MA Deng-zhe, JIN Ye (CIM Institute, School of Mechanical Engineering, Shanghai Jiaotong Univ.,Shanghai 200030,China);Study on Virtual Product Development and Its Modeling Method[J];Computer Integrated Manufacturing Systems;2002-04
8 Zou Xiangjun (Nanhua University, 421001);The Research Dynamic Three -dimensional Shape Simulated for Machinery Products[J];Computer Simulation;2001-04
9 LI Yuan,ZHANG Tao,YU Jian feng HE Wei ping,YANG Hai chang (Northwestern Polytechnical University, Xi′an710072);Research on Assembly Simulation Based on Operation Models[J];MECHANICAL SCIENCE AND TECHNOLOGY;2000-03
10 XIE Cun xi,CHENG Xiao yang,ZHANG Zheng,LI Qi yi (Department of Mechatronic Engineering, South China University of Technology, Guangzhou 510641);Analysis and Design of Robot Virtual Assembly Simulation System[J];Mechanical Science and Technology;2002-01
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved