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《Journal of the Chinese Society of Rare Earths》 2011-06
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Yttrium Oxide Thin Film/Tin-Diffused Optical Waveguide Sensor and Gas-Sensing Properties

Miriguli · Yiming,Patiman · Nizhamiding,Miriguli · Mohemaiti,Adalaiti · Abudureheman,Abliz · Yimit(College of Chemistry and Chemical Engineering,Xinjiang University,Urumqi 830046,China)  
The yttrium oxide thin films were fabricated by coating the thin film of yttrium oxide on the surface of tin-diffused glass optical waveguide using sol-gel method.The optical waveguide sensor was used to detect volatile organic compounds(VOCs) gases.The structure and grain size of the sensing film was characterized by X-ray diffraction(XRD).At room temperature the yttrium oxide thin film/tin diffused OWG had strong response to the xylene and chlorobenzene gases.Its detection range was 10-3~10-5(V/V).The sensor had several advantages of high sensitivity,low cost,fast response,easy fabrication,and good reversibility.
【Fund】: 国家自然科学基金资助项目(20965008)
【CateGory Index】: TB381
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